Thin Film Deposition Solutions

Wireless connectivity, speed, resistance to water, reliability and durability are now critical requirements for semiconductor chips, and thin film deposition can help solve these challenges. The thin films that are used to fabricate microelectronic devices are all formed using some kind of deposition technology - the formation of a deposit on a substrate. These include: Low Pressure, Plasma Enhanced, Sub-Atmospheric Pressure, and Atmospheric Pressure Chemical Vapor Deposition, Atomic Layer, Physical Vapor, Ultra-High Vacuum Chemical Vapor, and Epitaxial Deposition

MKS solutions for thin film deposition include plasma & reactive gas, effluent management, gas analysis, and vacuum, pressure, and flow measurement and control devices.

Thin Film Depostion

Learn More:

MKS Instruments Handbook Second Edition
Semiconductor Devices and Process Technology
Detailing the fundamental device physics, materials, and fabrication processes used to manufacture semiconductors.
A free book from MKS

Thin Film Deposition
A detailed discussion of thin film deposition processes

Baratron® Capacitance Manometers
For direct, gas independent, high accuracy pressure measurement

Mass Flow Controllers & Meters
Thermal & pressure based sensor technologies to bring products and processes to market faster, more reliably, and more cost effectively

Pressure Controllers and Valves
Solutions for vacuum pressure control backed by a relentless focus on operational excellence to improve the productivity of vacuum processes

RF Power Generators
Reliable solid state power for thin films processing equipment.

Microwave Generators and Systems
Compact industrial microwave generators and systems that are adaptable to a wide range of applications including thin film processing

Gas Analyzers
Mass Spectrometry, Fourier Transform Infrared (FTIR), Nondispersive Infrared (NDIR), or Tunable Filter Spectroscopy to analyze gas composition

Ozone Generators & Systems
In the clean semiconductor environment, Ozone reacts with a wide range of precursor gases to enable thin film deposition processes

Vacuum Flanges & Fittings
Fittings and accessories for vacuum piping systems

Foreline Process Traps
Trap by products of vacuum processes to prevent damage and clogging from downstream effluents

Automation Controllers and Modules
Automation controllers and modules are the building blocks that can be configured to provide specific functionality meeting the custom requirements of thin film applications

Ophir Power & Energy Sensors and Meters  
A complete range of laser power/energy sensors measuring femtowatts to hundreds of kilowatts and picojoules to hundreds of joules.

Ophir Laser Beam Profilers  
Solutions for beam characterization for any wavelength, at any power and for any beam diameter.