Semiconductor Etching Solutions

Semiconductor etching selectively removes material from a thin film on a substrate to create a pattern of that material on the substrate, a critical portion of the semiconductor device fabrication process, where a highly selective etch ensures semiconductor chip quality and yield.

MKS solutions for enhancing semiconductor etch processing include vacuum, pressure and flow measurement & control, plasma and power generation, ozone delivery, and process automation.

Semiconductor Etching

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MKS Instruments Handbook Second Edition
Semiconductor Devices and Process Technology
Detailing the fundamental device physics, materials, and fabrication processes used to manufacture semiconductors.
A free book from MKS

Semiconductor Etching
A detailed discussion of the etch processes used in semiconductor manufacturing

Baratron® Capacitance Manometers
For direct, gas independent, high accuracy pressure measurement

Pressure Controllers and Valves
Solutions for vacuum pressure control for improving the productivity of etch processes.

Mass Flow Controllers & Meters
Thermal and pressure based sensor technologies to bring products and processes to market faster, more reliably, and more cost effectively

Remote Plasma Sources
Generate low-energy ions and radicals to react with material surfaces and chamber walls, removing contaminants and act as a precursor for material deposition.

RF Power Generators
RF generators, and impedance matching networks for a complete RF delivery system are vital components of etch processing.

Microwave Generators & Systems
Power and plasma critical for etch and other processes

Mass Spectrometers
Quadrupole Mass Spectrometry (QMS) Systems monitor critical etch process conditions

Ozone Generators & Systems
Producing ultra-pure, reliable ozone gas reacting with a wide range of precursor gases to enable Etch (ALE).

Automation Controllers and Modules
Building blocks configured to meet the custom requirements of etch applications.

Fittings and Accessories for Vacuum Piping Systems
High quality vacuum flanges and fittings for etch processing