Equipment Analytics Solutions

The MKS solution for equipment analytics offers equipment or instrument users an analytics model that converts data to insight and to action, in an automated way. The solution successfully provides early indication that an instrument is unhealthy and enables the customer to schedule replacement or maintenance of the device to minimize unplanned downtime & scrap. Additionally, this solution helps to reduce sending healthy instruments back to the instrument suppliers, reducing costs and resources associated with product returns.


The MKS Equipment Analytics solutions is equipped with 5 key features:

  1. Data connectivity - supports proprietary communication drivers to communicate with MKS specific instruments as well as common interface methods such as standard analog & digital I/O, Ethernet/Modbus TCP or UDP, Serial (RS232 or RS485), EtherCAT, etc.
  2. Simple web based math functions for data pre-processing - enables a user to define logic that further extracts critical characteristics from the raw data being sent from the instrument, eg: max, min, average, integral, standard deviation, derivative, etc.
  3. Embedded analytics engine - the key capability of the MKS Equipment Analytics solution is the advanced analytical capabilities. Leveraging powerful real-time multivariate analytics, this solution can quickly characterize a system or instrument and then pinpoint root cause as the device operation changes over time.
  4. Visualization - the MKS platform translates the advanced analytics & models into a very user simple interface, enabling all users to understand and consume the results and insight.
  5. Internet of Things (IoT) enabled - easily configure the MKS Equipment Analytics platform to send notifications to users when issues are detected. Notifications can be sent via the standard data connectivity protocols, or they can be sent via text messages, emails, etc.

Learn more!

If you're interested in exploring MKS' equipment analytics solutions, contact us