Pursuant to 35 U.S.C. §, 287, MKS gives notice to the public that the following products may be protected by one or more of the listed U.S. patents. This website is provided to satisfy the virtual patent marking provisions of various jurisdictions including the virtual patent marking provisions of the United States. MKS strives, to the best of its ability, to provide the most accurate information possible. The following list of MKS products may not be all inclusive, and other MKS Products not listed here may be protected by one or more patents. MKS reserves the right to update this information at any time. Please consult your patent professional for any questions regarding the coverage of these listed patents.
| Product | Patents |
|---|---|
| Model 971B, 972B and 974B cold cathode vacuum pressure transducers | 10969290 |
| Edge RF generators | 7602127, 8040141, 8055203, 8110991, 8190380, 8264237, 8289029, 8334700, 8395322, 8576013, 8781415, 9041292, 9041471, 9136093, 9876476, 9947514, 10049857, 10217609, 10546724*, 10727027, 10741363, 10930470*, 11076477 (Edge 6060A), 11367592, 11527384 (Edge 10060Z and Edge 300380Z), 11533805 (Edge 6060A) |
| Model GHG RF generators | 8040141, 8576013, 8581597, 10049857, 10217609, 10727027, 11367592 |
| Path Finder impedance matching system | 8053991, 8120259, 8466623, 8884520, 10270418, 11823869 |
| Model SG1024 microwave generators | 9595930 |
| Model AC571 microwave generator | 11255016 |
| Series 49 Thermal Management System | 9686921 |
| LIQUOZON PrimO3 Reclaim Ozonated Water Delivery System | 7502114, 9056262, 9597613, 9796603 |
| DI-SOLVER NH3 Dissolved Ammonia Delivery System | 10773221 |
| DI-SOLVER CO2 Dissolved Carbon Dioxide Ultrapure Water Delivery System | 7731161, 8448925 |
| LIQUOZON VariO3 Dissolved Ozone Gas Delivery System | 7502114, 8085401, 8339607, 9580318 |
| LIQUOZON VariO3 Dissolved Ozone Gas Delivery System with Reclaim Functionality
Models: 18-xxBx-xxxx-xxH-xxx |
6786976, 7502114, 9056262, 9580318, 9597613, 9796603 |
| Airgard Air Analyzers | 7372573, 7595887 |
| MultiGas Spectrometers | 7546208 |
| MultiGas TFS Spectrometers | 8896839 |
| Precisive Spectrometers | 8896839, 9488570 |
| T3B, T2B series throttle valves | 7369920 |
| T3BIB-31755, T3BIB-32871, T3BIB-35018, T3BIB-33457 throttle valves | 11480457 |
| CRV series isolation valves | 8196893 |
| Cirrus 3, eVision 2, HPQ3, Microvision 2, Vision 2000-x gas analyzers | 8278909, 8415942 |
| Cirrus 3-XD, Microvision 2 XD, and Vision 2000-x XD gas analyzers | 8278909, 8415942, 8450681, 8796638, 8796620 |
| Model 134500-G4 flow regulator | 8037896, 8689822 |
| Model DLT2A and DLT2B flow ratio controllers | 7621290 |
| Model DLTNA3 flow ratio controller | 7673645 |
| Model DLTNA4 flow ratio controller | 7673645, 8849466 |
| Model DLT3B flow ratio controller | 7673645 |
| Model DLT4B flow ratio controller | 7673645, 8849466 |
| Model MFVA mass flow verifier | 7174263, 7463991 |
| Model MFVC mass flow verifier | 7757554, 7474968 |
| Model P2A mass flow controller | 7000463, 7000465, 7467027, 8079383, 8386083 |
| Model P4B mass flow controller | 7000463, 7000465, 7467027, 8079383, 8386083 |
| Model P9B mass flow controller | 7000463, 7000465, 7467027, 8079383, 8150553, 8386083, 10126760, 10353408, 10725484 |
| Model P250 mass flow controller | 7000463, 7467027, 8079383, 8386083 |
| Model GE50, GM50, GE250, GE300 mass flow controllers | 7000463, 7467027, 8079383, 8386083 |
| Model IE50, IM50, IM100, IE250, IE500, IE1000 mass flow controllers | 7000463, 7467027, 8079383, 8386083 |
| Cleanline plasma generators | 10535506, 11367598, 11745229 |
*Selected versions.
Revised 3/5/2024
Ultra-High Velocity