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MC20A Digital Metal-sealed 200 slm Mass Flow Controllers
Model: MC20A01322LM2BV
MC20A Digital Metal-sealed 200 slm Mass Flow Controllers
Model: MC20A01322LM2BV
Overview
Overview
The ALTA MC20A01322LM2BV is a general purpose mass flow controller with a Viton valve plug, rated for 200 slm Full Scale (N2), with an 8 VCR type male fitting and a 15-pin sub-D Connector for communications and control. To facilitate better chamber matching, ALTA MFCs feature improved accuracy to 1% of set point.
Technical Specs
- TypeMass Flow Controller
- Calibration GasN2 (or equivalent)
- Control Range0.4 - 200 slm
- Full Scale Flow Range200 slm
- Fitting Type8 VCR male
- Flow Input Output Signal0 - 5 VDC
- Analog I/O Connector15-pin D-sub
- Seal MaterialViton
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential20 - 50 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time≤30 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time≤2 sec
- Operating Temperature15 - 40°C
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316L stainless steel, Elgiloy®, Nickel
- External Leak Integrity<1 x 10-10
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig to vacuum. (To assure no flow-through, a separate positive shut-off valve is required.)
- Compliance<2 lbs. (0.9 kg)
- Surface Finish16 µinch Ra
- Typical Current Required at Steady State300 mA (9 Watts)
Technical Specs
- TypeMass Flow Controller
- Calibration GasN2 (or equivalent)
- Control Range0.4 - 200 slm
- Full Scale Flow Range200 slm
- Fitting Type8 VCR male
- Flow Input Output Signal0 - 5 VDC
- Analog I/O Connector15-pin D-sub
- Seal MaterialViton
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential20 - 50 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time≤30 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time≤2 sec
- Operating Temperature15 - 40°C
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316L stainless steel, Elgiloy®, Nickel
- External Leak Integrity<1 x 10-10
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig to vacuum. (To assure no flow-through, a separate positive shut-off valve is required.)
- Compliance<2 lbs. (0.9 kg)
- Surface Finish16 µinch Ra
- Typical Current Required at Steady State300 mA (9 Watts)
Resources & Downloads
Literature
MC20 ALTA™ Mass Flow Controller (archived)(354.3 kB, PDF)