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Sorry, this family of products is no longer available. The recommended replacement product is e29h-heated-capacitance-manometers-etch-sensor.

Specifications

  • Type
    Vacuum Pressure Transducer
  • Sensor Type
    Capacitance Manometer with Etch Baffle Sensor
  • Measurement Type
    Absolute
  • Sensor Temperature
    Controlled to 45°C or 100°C
  • Full Scale Pressure Ranges
    0.02 (45°C only), 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, 20000, 25000 Torr
  • Analog Output
    0 - 10 VDC into >10K Ω load
  • Analog Connector
    9-pin D-sub
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Ambient Operating Temperature
    45°C version: 15° to 40°C
    100°C version: 15° to 50°C
  • Volume
    6.3 cc
  • Warm-up Time
    2 hours for 1-25,000 Torr ranges
    4 hours for ranges < 1 Torr
  • Overpressure Limit
    45 psia (310 kPa) or 120% Full Scale, whichever is greater
  • Materials Exposed to Process Gases
    Inconel®
  • Power Requirements
    ±15 VDC±5% @ 0.25 Amps (0.6 Amps for 100°C version)
  • Compliance
    CE

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