Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Model: 390510-0-YG-T

$1,500

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Overview

The 390510-0-YG-T Micro-Ion® ATM Vacuum Gauge Module features 1x10^-9 Torr - Atmosphere pressure measurement, a 2.75 inch CF flange fitting, and RS485 communications. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

Product Series Overview

390 Micro-Ion® ATM Vacuum Transducers

Technical Specs

Absolute Measurement Range

1.0 x 10^-9 to 760 Torr
Differential Measurement Range

-750 to +250 Torr
Digital Communication

RS485
Type

Vacuum Gauge Module
Display

No
Interface

RS485
Relays

0
Fitting Type

2.75 in. CF
Operating Temperature

10 - 40°C (50° to 104°F), non-condensing
Maximum Bakeout Temperature

105°C (221°F) with electronics removed
Storage Temperature

-40 - 70°C (-40 - 158°F)
Analog Output

0.5-7.0 VDC (0.5 VDC per Decade Logarithmic)
Optional Analog Output 2

Differential:1-5 VDC (-750 to +250 Torr Linear)
Relay Contact Rating

Maximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
Power Requirements

24 VDC +10% to -15%, 1 Amp, 22 Watts nominal
Accuracy

Absolute: 1x10^-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
Repeatability

1x10^-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10^-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10^-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
Internal Volume

10.8 cm³ (0.65 in.³)
Exposed Materials

304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
Electronic Casing and Flange

Aluminum Extrusion with Powder-coat

Compliance

CE
Filament

Yttria-coated Iridium
Response Time

<25 mseconds
Connectors

15-pin subminiature-D male
Units

Torr
RS485 Communications

ASCII: No parity, one stop bit
RS485 Address

0 - 63, selected by using address switch and RS485 command
RS485 Baud Rates

1200, 2400, 4800, 9600, 19200 (default), 38400
RS485 Interface

2-wire, half-duplex
X-ray Limit

<3 x 10^-10 Torr, <4 x 10^-10 mbar, <4 x 10^-8 Pascal
Emission Current

Autoranging
Degas

Electron bombardment, 3 Watts for 1 minute/filament
Automatic Ionization Gauge On Setting

2 x 10^-2 Torr, 2.66 x 10^-2 mbar, 2.66 Pa, with decreasing pressure
Automatic Switch to High Emission Setting

5 x 10^-6 Torr, 6.66 x 10^-6 mbar, 6.66 x 10^-4 Pa, with decreasing pressure
Automatic Ionization Gauge Off Setting

3 x 10^-2 Torr, 3.99 x 10^-2 mbar, 3.99 Pa, with increasing pressure
Automatic Switch to Low Emission Setting

1 x 10^-5 Torr, 1.33 x 10^-5 mbar, 1.33 x 10^-3 Pa, with increasing pressure
Heat-loss Sensor Wires

Gold-plated tungsten
LED Indicator

Module status
Maximum Inrush Current

2 Amps, 48 Watts, for 0.5 seconds

Technical Specs

Absolute Measurement Range

1.0 x 10^-9 to 760 Torr
Differential Measurement Range

-750 to +250 Torr
Digital Communication

RS485
Type

Vacuum Gauge Module
Display

No
Interface

RS485
Relays

0
Fitting Type

2.75 in. CF
Operating Temperature

10 - 40°C (50° to 104°F), non-condensing
Maximum Bakeout Temperature

105°C (221°F) with electronics removed
Storage Temperature

-40 - 70°C (-40 - 158°F)
Analog Output

0.5-7.0 VDC (0.5 VDC per Decade Logarithmic)
Optional Analog Output 2

Differential:1-5 VDC (-750 to +250 Torr Linear)
Relay Contact Rating

Maximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
Power Requirements

24 VDC +10% to -15%, 1 Amp, 22 Watts nominal
Accuracy

Absolute: 1x10^-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
Repeatability

1x10^-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10^-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10^-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
Internal Volume

10.8 cm³ (0.65 in.³)
Exposed Materials

304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
Electronic Casing and Flange

Aluminum Extrusion with Powder-coat

Compliance

CE
Filament

Yttria-coated Iridium
Response Time

<25 mseconds
Connectors

15-pin subminiature-D male
Units

Torr
RS485 Communications

ASCII: No parity, one stop bit
RS485 Address

0 - 63, selected by using address switch and RS485 command
RS485 Baud Rates

1200, 2400, 4800, 9600, 19200 (default), 38400
RS485 Interface

2-wire, half-duplex
X-ray Limit

<3 x 10^-10 Torr, <4 x 10^-10 mbar, <4 x 10^-8 Pascal
Emission Current

Autoranging
Degas

Electron bombardment, 3 Watts for 1 minute/filament
Automatic Ionization Gauge On Setting

2 x 10^-2 Torr, 2.66 x 10^-2 mbar, 2.66 Pa, with decreasing pressure
Automatic Switch to High Emission Setting

5 x 10^-6 Torr, 6.66 x 10^-6 mbar, 6.66 x 10^-4 Pa, with decreasing pressure
Automatic Ionization Gauge Off Setting

3 x 10^-2 Torr, 3.99 x 10^-2 mbar, 3.99 Pa, with increasing pressure
Automatic Switch to Low Emission Setting

1 x 10^-5 Torr, 1.33 x 10^-5 mbar, 1.33 x 10^-3 Pa, with increasing pressure
Heat-loss Sensor Wires

Gold-plated tungsten
LED Indicator

Module status
Maximum Inrush Current

2 Amps, 48 Watts, for 0.5 seconds

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Model: 390510-0-YG-T

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Model: 390510-0-YG-T

Overview

Overview

Product Series Overview

Technical Specs

Technical Specs

Technical Specs

PART: 390510-0-YG-T

Need help?

Product Comparison

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Model: 390510-0-YG-T

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485

Model: 390510-0-YG-T

Overview

Overview

Product Series Overview

Technical Specs

Technical Specs

Technical Specs

PART: 390510-0-YG-T

Need help?