MKS Instruments Handbook
Semiconductor Devices and Process Technology

MKS Handbook


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The Semiconductor Devices and Process Technology handbook presents the fundamental device physics, materials, and fabrication processes used to manufacture semiconductors, as well as the technologies, instruments, and equipment that are used to monitor, control, and automate the fabrication processes. This comprehensive 200+ page text was initially conceived as training material for our employees. As it has evolved, we want to share it with you, our customers, suppliers, and partners in the semiconductor industry at no charge, with the hope that you will find it informative and of some value to your work.