Microwave Technology in Next-Gen Semiconductor Fabrication

Overview

Microwave Technology: Optimizing Next-Generation Semiconductor Fabrication

Microwave technology is a strategic, high-leverage enabler for advancing chip fabrication. As device geometries shrink to angstrom levels and the materials landscape diversifies (including compound semiconductors like SiC and GaN), semiconductor fabs require solutions that deliver unparalleled precision, efficiency, and yield. MKS's microwave-based systems are engineered to meet these rigorous demands.

Microwave Technology: Optimizing Next-Generation Semiconductor Fabrication

MKS Microwave Solutions: Applications Driving Yield

MKS microwave technology delivers critical advantages across the following key process steps:

  • Microwave Plasma Ashing: Achieve gentle, highly selective photoresist removal critical for advanced nodes and sensitive compound semiconductors. Our systems ensure minimal substrate damage and high material compatibility.
  • Microwave-Assisted Drying & Curing: Accelerate process flow with faster, exceptionally uniform curing of photoresists and fragile low-k dielectrics, significantly reducing thermal stress on the wafer.
  • Microwave Annealing: Enable low thermal budget dopant activation, essential for managing thermal excursions and maintaining the integrity of complex device architectures.
  • Microwave Plasma Surface Treatment: Execute damage-free cleaning and precise native oxide removal critical for subsequent deposition and bonding steps, preserving surface quality.
  • Microwave-Enhanced Plasma CVD (PECVD): Achieve higher plasma density compared to traditional RF sources, resulting in superior film quality and dramatically shorter process times (increased throughput).
  • Microwave Heating in Wafer Bonding: Facilitate highly localized heating for advanced packaging and 3D stacking, ensuring precise thermal management and preventing overheating of the entire wafer stack.

The MKS Advantage

With decades of deep expertise spanning microwave engineering, plasma physics, advanced materials science, and critical process control, MKS is uniquely positioned to help fabs strategically integrate and leverage microwave technology for their most demanding next-generation manufacturing challenges.

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