Microwave Plasma: Driving Scalable, High-Quality Graphene Production

Overview

Graphene is a groundbreaking material with exceptional properties, including high electron mobility, thermal conductivity, and mechanical strength. However, realizing its full potential requires precise synthesis at scale. For applications ranging from wafer-scale to roll-to-roll production, microwave plasma is setting the new benchmark for quality and efficiency.

Microwave Plasma: Driving Scalable, High-Quality Graphene Production

The Advantages of Microwave Plasma for Graphene Synthesis

  • High Electron Density & Energy Transfer: Microwaves couple directly with electrons, generating a high-density, high-temperature plasma. This energetic environment is ideal for the precise formation of sp² carbon bonds, which are critical for high-quality graphene.
  • Uniform Plasma Distribution: Ensures consistent nucleation and layer-by-layer growth across large substrates, eliminating variations that can compromise performance.
  • Reduced Contamination: Unlike conventional plasma sources that can erode electrodes, microwave plasma operates without internal electrodes, minimizing impurities in the final graphene film.

MKS Microwave Generators: Engineered for Performance

MKS offers a range of microwave generators specifically designed to meet the rigorous demands of advanced material manufacturing. Our solutions provide the power and control necessary to push the boundaries of graphene production.

  • Power for Every Scale: Our generators are available in a wide range, from 15 kW at 2.45 GHz for lower-volume systems to over 100 kW at 915 MHz for high-throughput industrial platforms.
  • Exceptional Process Stability: MKS technology maintains plasma uniformity and stability even under dynamic pressure and gas flow conditions, ensuring repeatable results.
  • Proven Reliability: Engineered for the highly demanding environments of semiconductor and advanced materials fabrication, our systems deliver consistent, long-term performance.

MKS technology empowers engineers to achieve scalable, high-quality graphene growth with unmatched performance and precise process control.

Learn More: