TOOLweb® RGA Gateway Integration

This schematic shows MKS’ TOOLweb RGA gateway integrated with a production tool. Tool metadata is passed to the host via SECS/GEM. Data from multiple data sources now has time sync alignment. The TOOLweb RGA Gateway enables RGA control and RGA data to be fed into the SECS/GEM data stream. Other sensor data, e.g. arcing detector, can also be fed into the SECS/GEM data stream.

SECS/GEM Communications

The SECS/GEM communications protocol (SEMI Equipment communications Standard/Generic Equipment Model) is the main protocol for automation communications between a fab host and equipment in the semiconductor industry. In general, equipment design usually supports only a single client (tool) communication to a host (MES/FDC) system and does not allow communications to external third-party applications. For this reason, integration of many third-party devices such as a Residual Gas Analyzer (RGA) into OEM tools requires the fab enduser to provide the means for data integration between the sensor and the host. The TOOLweb® RGA Gateway is a hardware platform for the Multiplexing Software and the Sensor Integration Platform Software. It is a fanless, Product Features compact Linux embedded computer which runs on a Linux kernel. All required kernel drivers are preloaded to support current hardware requirements. The TOOLweb RGA Gateway converts machine analog or digital communication protocols to SECS/GEM transmitting the data to the equipment or host GEM controllers; it also acts as a data multiplexer. The TOOLweb RGA Gateway enables communication between one process tool and various hosts at the same time and is logically located between a process tool and up to four hosts. In addition, the TOOLweb RGA Gateway can inject or map information from several sensors into the data flow from the tool to the hosts by means of Virtual IDs.