Specifications

  • Type
    Ozone Gas Generator
  • Ozone Output
    up to 335 g/Nm3
  • Flow Rate
    5 - 80 slm
  • Feed Gas
    Oxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
  • Nominal Cell Pressure (Delivery)
    15 - 45 psig (100 - 310 kPa)
  • Pressure
    20 - 50 psig
  • Control Interface
    Front panel control and remote operation
  • Cooling Water Temperature
    5 - 25°C (41 - 77°F)
  • Cooling Water Filtration
    100 microns
  • Cooling Water Quality
    Resistivity ≥50 KΩ/cm
  • Minimum Water Flow
    22.7 lpm (6.0 gpm)
  • Voltage Requirements
    208 VAC (±10%)
  • Phase
    3Ø & Ground, no Neutral
  • Current Requirements
    50 Amps
  • Frequency
    50/60 Hz
  • Weight
    77 kg (170 lb)
  • Dimensions
    483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
  • Compliance
    CE, UL/CSA, and SEMI F47

Resources

Application Notes
Drawings And Cad
Literature

Need help?

Contact an Applications Specialist by sending us an email