Rapid Vacuum Isolation Valves
Overview
Rapid Vacuum Isolation Valves offer extremely fast closing speeds to protect the vacuum system during a backpressure event caused by pump failure. Many valves do not close fast enough to prevent particles and turbulence from moving upstream and damaging the process.
- NW16 - NW160
- Protects vacuum system from particles and turbulence during pump failure
- <50 to 600 msec closing time (depending on configuration)
Products
| Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|
| RI-VALVE Vacuum Isolation Valve, High Speed, Fast Closing |
|
Specifications
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TypeHigh Speed, Fast Closing Vacuum Valve
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Port SizeVarious, NW16 to NW160
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Closing Time<50 to 600 msec, depending on configuration
Features
Applications
In most applications, there are two isolation valves in the vacuum foreline; one near the chamber exit for process isolation and one directly upstream of the pump for preventative maintenance work.
The Rapid Isolation Valve can be triggered a number of ways, including:
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Power to the pump - many pumps have accessory relays which can be easily tapped.
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Programmable Automation Controller (PAC) or equivalent device providing logic.
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Pressure Sensors, based either on a threshold pressure or a rate-of-rise.
Resources
Application Notes
- Eliminate Particle Contamination Caused by Pump Failure (1,014.3 kB, PDF)
Ultra-High Velocity