Specifications

  • Type
    LIQUOZON® Stream 140 slm Ozone Water Delivery System
  • Ozone Concentration
    25 - 115 ppm
  • Flow Rate
    5 - 140 lpm
  • Feed Gas
    O2
  • Feed Gas Quality
    ≥Grade 4 (purity≥99.99 %), dew point <-40°C
  • Feed Gas Flow Rate
    20 slm (approximate)
  • Feed Gas Inlet Pressure
    5.0 - 7.6 barg (0.50 - 0.76 MPag)
  • Dopant Gas
    CO2
  • Dopant Gas Quality
    ≥Grade 4.5 (purity≥99.995 %)
  • Dopant Gas Flow Rate
    0.5 slm (typical)
  • Dopant Gas Inlet Pressure
    5.0 - 7.6 barg (0.50 - 0.76 MPag)
  • UPW Quality
    Half Life Time of O3 in UPW: >12 min @ 20°C
  • UPW Pressure
    1.0 barg - 4.0 barg
  • UPW Purity
    According to the process demands. Typically with filtration, demineralization, reverse osmosis, deionization (< 0.1 ppb Metals, < 10 particles/ml of 0.1 µm size, free of organics)
  • UPW Temperature
    15 - 25°C (59 - 77°F), rated 20°C (68°F)
  • Cooling Water Flow Recommended
    9.0 L/min (typical)
  • Cooling Water Inlet Pressure
    5.0 barg (0.50 MPag)
  • Cooling Water Temperature
    Rated 20°C, range 17-23°C
  • Cooling Water Quality
    Demineralized, filtration (≤20 µm)
  • Ambient Temperature
    15 - 25°C (59 - 77°F), rated 20°C (68°F)
  • Wetted Surfaces
    Liquid: PFA, PTFE, quartz glass
    Gas: 316L stainless steel, PFA , PTFE
  • Control Interfaces
    Binary in/out (dry contacts), RS232
  • Power
    3/PE~ 200 - 208 V ± 10%
  • Dimensions
    610 x 1011 x 1,977 mm (24 x 39.8 x 77.8 inches) (W x L x H)
  • Weight
    420 - 450 kg, depending on configuration
  • Compliance
    CE, SEMI S2-0302, SEMI F47, SEMI S2

Resources

Drawings & CADs
Literature
Application Notes

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