Jalapeño Heated Vacuum Isolation Valves
Overview
Jalapeño Vacuum Valves are specifically designed to withstand high internal temperatures to limit process by-product buildup and reduce system maintenance. The valves are specially designed with a thermal barrier between the actuator and the stainless-steel housing, insulating the internal wetted surfaces, greatly improving thermal performance. The Jalapeño Series has a separate thermal barrier located between the valve housing and the valve body. The valves feature spring-to-close, air-to-open pneumatic operation and are available in port diameters ranging from 1 inch to 4 inches. The MKS Jalapeño LoPro™ Series actuator cap is made entirely of a high-quality polymer to provide a superior thermal barrier for the valve housing.
- Maintains optimal valve conductance ensuring materials don’t solidify and clog the system
- Actuator thermal barrier design improves internal thermal performance and reduces external temperature to safe touch levels
- Formed bellows-sealed poppet valve reduces particle trapping resulting in high cycle life
Products
Configuration Options
The Jalapeño vacuum valves can be configured/ordered with or without heater jackets, and Jalapeño valve heater jackets can also be ordered separately.
See the Jalapeño Heated Vacuum Isolation Valve datasheet for all product options.
Features
Jalapeño Standard & LoPro Valves
Jalapeño Standard Isolation Valves are available in sizes ranging from NW50 - NW100. These valves are suitable for general vacuum isolation where maximum conductance and reliable operation is required. Jalapeño Standard Isolation Valves are also available as two-stage designs with an integrated bypass valve that can be used for soft-pumping.
Jalapeño LoPro Low-profile Isolation Valves are available in sizes ranging from NW25 - NW50. The compact Jalapeño LoPro design, like our unheated LoPro Valves, provides 1,000,000 cycle life operation, a more compact form factor, and a simplified disassembly process for ease of service. Both the Jalapeño Standard and Jalapeño LoPro valves are available in NW50 size.
Jalapeño Standard Valve
Jalapeño LoPro Valve
For applications where high cycle life is desired Jalapeño LoPro is recommended. For all other applications, Jalapeño Standard is a suitable option.
Jalapeño Thermal Management System
The Jalapeño Vacuum Valves are heated with MKS' Series 49UL Thermal Management System. The heater has a set point temperature of 170°C and typically reaches set point temperature in less than 30 minutes. The heaters can be daisy-chained with integral locking connectors and are available in either polyimide or PTFE-woven materials. The heaters are wired in parallel and independently controlled. A power cord is required for every 10 amps drawn by a chain of heaters.
The S49UL Thermal Management System provides a complete, integrated Thermal Heater Solution for multiple and custom applications.
Specifications
Jalapeño Standard & LoPro Valve Specifications
|
Main Valve |
ByPass Valve |
|
|---|---|---|
| Vacuum Range | Atmosphere to below 10-9 Torr | Atmosphere to below 10-9 Torr |
| Helium Leak Rate | Less than 1.0 x 10-9 std cc/sec | Less than 1.0 x 10-9 std cc/sec |
| Cylinder Air Pressure | 60-100 psig | 60-120 psig |
| Limit Switch Rating, Single Pole, Double Through | 5A, 250VAC/5A, 30VDC | n/a |
| Pneumatic Cylinder Displacement Volume | n/a | 0.25 in.3 (4.1 cm3) |
| Approximate Pneumatic Closing Time | n/a | 100 msec |
| Blow-By Pressure | n/a | 47 psia |
| Maximum Internal Spring Closing Pressure | n/a | 40 psia |
Jalapeño Standard Valve Specifications
|
Port Size |
Actuator Cylinder Volume |
Actuation Opening/Closing Time |
Blow By Pressure |
Maximium Internal Spring Closing Pressure |
|---|---|---|---|---|
| 2.0 in. (NW50) | 13.3 in.3(218 cm3) | 1,000/2,000 msec | 45 psia | 38 psia |
| 3.0 in. (NW80) | 27.6 in.3(453 cm3) | 2,000/2,000 msec | 38 psia | 40 psia |
| 4.0 in. (NW100) | 27.6 in.3(453 cm3) | 2,000/2,000 msec | 30 psia | 30 psia |
Jalapeño LoPro Valve Specifications
|
Port Size |
Actuator Cylinder Volume |
Actuation Opening/Closing Time at 100 psi |
Blow By Pressure |
Maximium Internal Spring Closing Pressure |
|---|---|---|---|---|
| 1.0 in. (NW25) | 1.2 in.3(20 cm3) | 40/90 msec | 80 psia | 43 psia |
| 1.5 in. (NW40) | 2.2 in.3(36 cm3) | 60/90 msec | 50 psia | 60 psia |
| 2.0 in. (NW50) | 6.4 in.3(105 cm3) | 160/220 msec | 45 psia | 38 psia |
Resources
Literature
- Jalapeño Heated Vacuum Isolation Valves (4.5 MB, PDF)
Ultra-High Velocity