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Description
DA03B DA03B Capacitance Manometer, EtherCAT, Heated to 150 or 200°C

Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Absolute
  • Full Scale Range
    1, 2, 3, 5, 10, 20, 100, 1000 Torr
  • Accuracy
    ±0.25% of Reading
  • Fitting Type
    Standard:
    0.5 in. (12 mm) OD tube
    Optional:
    Swagelok® 8 VCR® female, 8 VCR male, NW16-KF, NW25-KF, Mini-CF, 1.5 in. TriClover, 2 in. TriClover
  • Analog Output
    Analog 0-10 VDC into >10kW load, EtherCAT
  • Trip Relays
    Standard:
    Two (2) internal solid state relays provided for heater "at temperature" status and heater failure. Relay capacity of 1 amp at 30 VDC.
    Optional:
    Two (2) internally mounted process pressure trip relays, solid state, independently adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay capacity of 1 amp @ 30 VDC.
  • Resolution
    0.001% of Full Scale
  • Zero Temperature Coefficient
    150°C/160°C:
    ±0.004% Full Scale/°C for >1 Torr
    ±0.008% Full Scale/°C for 1 Torr range
    200°C:
    ±0.008% Full Scale/°C for >1 Torr
    ±0.016% Full Scale/°C for 1 Torr range
  • Span Temperature Coefficient
    ±0.02% Reading/°C
  • Response Time
    Analog/Digital:
    35 ms (nominal) influenced by pressure range, step size, and digital pressure filter settings
    EtherCAT:
    Refresh Rate = 3.3 ms
  • Warm-up Time
    2.5 hours typical
  • Internal Volume
    6.3 cm3 typical. Contact MKS for volumes with specific flanges.
  • Operating Temperature
    15 - 50°C
  • Overpressure Limit
    45 psia
  • Materials Exposed to Process Gases
    Inconel® and Incoloy® nickel alloys (some fitting options are 300 Series Stainless)
  • Power Requirements
    ±15 VDC @ 1.6A or +24 VDC @ 1.3A at start up (factory set)
  • Ambient Airflow Requirements
    150/160°C Models:
    50 ft/min for ambient temperatures of 40 - 50°C
    200°C Models:
    150 ft/min for ambient temperatures of 40 - 50°C
  • Compliance
    CE, UL1577 (Trip Relays only)

Features

DA03B Details

The DA03B is completely self-contained and is available in either +24 VDC or ±15 VDC input power configurations. Its Inconel® sensor is resistant to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. Optional sensors and deposition traps are available for enhanced zero drift capabilities. The high-performance digital electronics of the DA03B also includes fail-safe over-temperature protection and LED status lights to indicate the operating state. Solid state relay outputs provide indication of sensor at temperature and heater failure. Additional options include an internally-mounted set of two (2) UL recognized solid state trip relays provided for pressure trip points for control of external equipment or components. The pressure trip relays may be set by the user over the EtherCAT bus at atmospheric pressure, eliminating the need for vacuum pumps during set point adjustment.

DA03B Key Features

  • Sensor operating temperature of 150°C to 200°C (factory set)
  • High 45 psia overpressure rating for improved stability and repeatability
  • Optional internally-mounted, user programmable solid state process relays for external control
  • Insensitive to gas composition
  • EtherCAT interface and analog outputs

Internally Heated to 150, 160, or 200°C

These capacitance manometers are temperature controlled to 150, 160, or 200 degrees C for improved accuracy. Unheated sensors are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer permitting use in the most demanding advanced applications, such as  Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), semiconductor processes, and lyophilization.

The pressure sensor is located inside a constant temperature oven for improved pressure measurement accuracy.

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

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