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The RPDG-50 is a 5,000W Asymmetric Bipolar Pulsed DC generator that enables deposition of a wide variety of low defect films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN.
- 5,000 W asymmetric bipolar pulsed DC generator
- For reactive* PVD, CVD bias and hard coating
- Programmable frequency and duty cycle See All Features
Specifications
- TypeRPDG-50 5kW Pulsed DC Plasma Generator
- FrequencyProgrammable from 25 to 125 kHz or 50 to 250 kHz (Range set by factory)
- Duty CycleProgrammable from 0 to 40% (Reverse Bias)
- Power Output5kW
- Power Limit5.25kW for rated 5kW output respectively; proportional at other power levels
- Current Limit10.5A
- Regulation ModesVolts, Amps, Watts
- Output Control ModesRamping, Run Time, Joule, Sequence, Constant Run
- DC Linearity/Accuracy Independent of Regulation Mode±0.1%: 10-100% of rated output
- DC Linearity/Accuracy in Watts Mode±0.25%: 1-10% of rated output
- Line Regulation±0.1% for ±10% line voltage change ±2% line frequency change
- Load Regulation±0.1% for a 4:1 load impedance range
- Line Voltage and Current200-208V (-7.5%+10%)/19A/25A
400V (±10%)/11A/14A
480V (±10%)/9A/11A
AC Input (3-phase)/Nom/Max - Line Frequency50 and 60 Hz, ±2%
- Line-to-Output Efficiency>85%
- Input Power Factor>0.7 at maximum power output
- Fully Functional Front PanelProvides complete control and monitoring from the master unit
- Remote Front PanelProvides complete remote control and monitoring functions
- Blank Front PanelThree LEDs indicate AC On, DC On, and Fault
- Cooling SystemForced air - front panel & right side in, rear panel out
- Weight55 lbs (25kg)
- Dimensions5.22 x 18.9 x 24.8 inches (132.5 x 480 x 631 mm) (H x W x D) including rack mount & handles
- ComplianceCE, CAN/CSA-C22.2 No. 61010.1, UL 61010-1, IEC 68-2-9 test for bump, IEC 68-2-6 test for vibration, IEC 68-2-23 test for bump
- Operating Temperature5 to 40°C
- Relative Humidity80% RH maximum at up to 31°C (decreasing linearly to 50% RH maximum at 40°C) (operational)
- Maximum Operating Altitude+3500 meters above sea level
- Digital and Analog Interface Connections9-pin Type D with RS232 / 422 ENI Protocol, 25 pin Analog
- Optional Interface ConnectionsPROFIBUS®, DNET™
- Output ConnectionsUHF female or Terminal Block
- AC Input Connections5 terminal barrier strip
- Interlock Connections2 terminal PC header
- Rack MountingEIA (Standard)
Universal JIS Bracket (optional)
Resources
Drawings & CADs
Literature
RPDG-50 & RPDG-100 Pulsed DC Plasma Generators (archive)(252.5 kB, PDF)
