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245 Metal-seated Flow Control Valve

Overview

The 245 Valve is an all-metal, bakeable control valve, capable of controlling pressure from 10^-11 to 6000 Torr, with a maximum throughput up to 2500 Torr-liters/sec (200 slm). The valve can be used with many corrosive gases that preclude the use of other valves. With the valve driver assembly removed, the valve may be baked to 450°C for UHV applications. The stepper motor used to drive the 245 allows response to pressure or set point changes in fractions of a second, and will drive the valve from a fully closed to a fully open position in only 15 seconds.

Specifications

Type

245 Metal-seated Control Valve
Full Scale Flow Range

10^-11 to 6000 Torr
Closed Conductance Leakage

<10^-9 scc/sec
Maximum Throughput

2500 Torr-liters/sec (200 slm)
Maximum Inlet Pressure

200 psig on center port, 25 psig on other port

Exposed Materials

304 sst and fine silver
Fitting Type

1/4 inch (6.35 mm) OD tubulation
Operating Temperature

0 - 50°C
Bake Out Temperature

450°C (with driver removed and bakeout clamp installed)