The Series 225 Auto-Soft is a flow-actuated check valve used for throttling roughing pumps during initial evacuation. Auto-Soft check valves close very quickly at the start of system evacuation and open automatically upon reaching a set pressure differential. This leaves the pumping line open for the balance of the pumping process.
Auto-Soft has a vane that pivots about an off-center axis. A pair of coil springs hold the vane open when the pressure differential is low enough. When the roughing system goes into operation, the initial flow closes the vane assembly, automatically throttling the roughing pump. Initial pumpdown occurs through small openings around the vane. This reduces the effective pumping speed, which minimizes turbulence and extends pumpdown time. When the pressure differential reaches the level determined by the springs, the springs open the vane and full pumping speed is restored. When installing the Auto-Soft, adequate space is needed, the amounts are listed in the specifications table. The user can adjust the closed conductance of the valve over a limited range by bending tabs adjacent to the vane. The Auto-Soft should be installed between the vacuum system and the roughing valve. Trapping of contamination before the Auto-Soft will help to ensure a long life.
In the semiconductor, thin film, and other industries, Auto-Soft replaces pressure controlled bypass valves to provide a soft start. The soft start then reduces turbulence in the vacuum system. Particles resident in the system are not stirred up and the work in progress is not damaged. During pumpdown, the pressure differential across products in the system can displace or break them. Auto-Soft slows the pumpdown process, eliminating the wide pressure differential. Auto-Soft can be used when venting a system. Used with a vent valve, Auto-Soft will reduce turbulence and extreme pressure differentials while venting the system. Auto-Soft can be used in many other applications. When used with potting compounds, Auto-Soft prevents excessive foaming. Auto-Soft used in a vacuum glove box avoids the rupture of filters. When used on a system with a mechanical pump, Auto-Soft reduces exhaust oil mists.