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Mass-Flo® Vapor Source Mass Flow Controller with Viscous Laminar Flow
Mass-Flo® Vapor Source Mass Flow Controller with Viscous Laminar Flow
The 1152C Mass-Flo® Vapor Source Mass Flow Controller is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas. The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control.
Specifications
- Flow MethodViscous flow through a laminar flow tube
- Full Scale Flow Range1 to 1000 sccm typical
- Control Range5.0 to 100% of Full Scale
- Typical Accuracy±5.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution±0.1% of Full Scale
- Operating Temperature30°C to 100°C, adjustable
- Optional Operating Temperature Range90°C to 150°C
- Settling Time1 second to within 2% of set point
- Controller Input Power Required±15 VDC (±2%) @ 0.28 Amps
- Heater Input Power Required±15 VDC @ 1.5 Amps
- Set Point Signal0-5 VDC from <20 KΩ
- Flow Output Signal0-5 VDC into >10 KΩ
- Temperature Output10 mV/°C
- Relay Contact Ratings2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive
- Signal Connector15-pin Type "D", RFI/EMI shielded
- Heater Connector9-pin Type "D", RFI/EMI shielded
- Maximum Line Pressure35 psia
- External Leak Integrity<1 x 10-9 scc/sec He
- Leak Integrity Through Closed Valve<1% of Full Scale or 1 sccm, whichever is greater
- Wetted MaterialsInconel, 316 S.S., nickel
- Mounting PositionDo not mount upside-down
- Fitting TypeSwagelok® 8 VCR® male
- Weight7.9 lbs (3.59 kg)
- ComplianceCE
Resources
Literature
Manuals
1152C Mass Flow Controller Operation Manual(164.4 kB, PDF) 1150 and 1152 Mass Flow Controller Pin-outs(21.1 kB, PDF)