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Mass-Flo® Vapor Source Mass Flow Controller with Viscous Choked Flow
Mass-Flo® Vapor Source Mass Flow Controller with Viscous Choked Flow
1150C Mass-Flo® Vapor Source Mass Flow Controllers are pressure based measurement and control systems designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas using viscous flow through a choked orifice.
Specifications
- Flow MethodViscous Flow Through a Choked Orifice
- Full Scale Flow Range1 to 1000 sccm (N2 equivalent)
- Control Range5.0 to 100% of Full Scale
- Typical Accuracy±5.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution±0.1% of Full Scale
- Operating Temperature30°C to 100°C, adjustable
- Optional Operating Temperature Range90°C to 150°C
- Settling Time1 second to within 2% of set point
- Controller Input Power Required±15 VDC (±2%) @ 0.28 Amps
- Heater Input Power Required±15 VDC @ 1.5 Amps
- Set Point Signal0-5 VDC from <20K Ω
- Flow Output Signal0-5 VDC into >10K Ω
- Temperature Output10 mV/°C
- Relay Contact Ratings2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive
- Signal Connector15-pin Type "D", RFI/EMI shielded
- Heater Connector9-pin Type "D", RFI/EMI shielded
- Maximum Line Pressure35 psia
- External Leak Integrity<1 x 10-9 scc/sec He
- Leak Integrity Through Closed Valve<1% of Full Scale or 1 sccm, whichever is greater
- Wetted MaterialsInconel, 316 S.S., nickel
- Mounting PositionDo not mount upside-down
- Fitting TypeSwagelok® 8 VCR® male
- Weight7.9 lbs (3.59 kg)
- ComplianceCE
Resources
Literature
Manuals
1150C Mass Flow Controller Operation Manual(164 kB, PDF) 1150 and 1152 Mass Flow Controller Pin-outs(21.1 kB, PDF)