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MC20A Digital Metal-sealed 200 slm Mass Flow Controllers
Model: MC20A01322LR2EV
MC20A Digital Metal-sealed 200 slm Mass Flow Controllers
Model: MC20A01322LR2EV
Overview
Overview
The all-digital ALTA MC20A01322LR2EV is a general purpose mass flow controller with a Viton valve plug, rated for 200 slm Full Scale (N2), with an 4 VCR type male fitting and 15-pin type D connector (with alternate configuration) for communications and control. To facilitate better chamber matching, ALTA MFCs feature improved accuracy to 1% of set point. Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf.
Technical Specs
- TypeMass Flow Controller
- Calibration GasN2 (or equivalent)
- Control Range0.4 - 200 slm
- Full Scale Flow Range200 slm
- Fitting Type4 VCR male
- Flow Input Output Signal1 - 5 VDC
- Analog I/O Connector15-pin D-sub (alternate)
- Seal MaterialViton
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential20 - 50 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time≤30 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time≤2 sec
- Operating Temperature15 - 40°C
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316L stainless steel, Elgiloy®, Nickel
- External Leak Integrity<1 x 10-10
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig to vacuum. (To assure no flow-through, a separate positive shut-off valve is required.)
- Surface Finish16 µinch Ra
- Weight<2 lbs. (0.9 kg)
Technical Specs
- TypeMass Flow Controller
- Calibration GasN2 (or equivalent)
- Control Range0.4 - 200 slm
- Full Scale Flow Range200 slm
- Fitting Type4 VCR male
- Flow Input Output Signal1 - 5 VDC
- Analog I/O Connector15-pin D-sub (alternate)
- Seal MaterialViton
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential20 - 50 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time≤30 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time≤2 sec
- Operating Temperature15 - 40°C
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316L stainless steel, Elgiloy®, Nickel
- External Leak Integrity<1 x 10-10
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig to vacuum. (To assure no flow-through, a separate positive shut-off valve is required.)
- Surface Finish16 µinch Ra
- Weight<2 lbs. (0.9 kg)
Resources & Downloads
Literature
MC20 ALTA™ Mass Flow Controller (archived)(354.3 kB, PDF)