Sorry, this family of products is no longer available. For recommended replacements see mass-flow-controllers.

Digital Metal-sealed 200 slm Mass Flow Controllers

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Overview

ALTA Mass Flow Controllers (MFC) feature fast gas settling times to meet the productivity demands of next generation process tools. To facilitate better chamber matching, the ALTA features improved accuracy to 1% of set point.

Specifications

Fitting Type

Swagelok® 4 VCR® male (50 slm)
Swagelok® 8 VCR® male (50, 100, 200 slm)
Analog I/O Connector

15-pin Type "D"
Power Requirements

±15 VDC (9 Watts)
Set Point Command Signal

0 to 5 VDC
Wetted Materials

316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
Valve Seat Material

Viton®, Buna-N, Kalrez®
External Leak Integrity

< 1 x 10^-10

Leak Integrity Through Closed Valve

<1.0% of F.S. at 25 psig to vacuum
Compliance

16µ inch average Ra
Weight

2 lbs (0.9 kg)
DeviceNet Network Size

Up to 64 nodes
DeviceNet MAC ID Switches Addresses

2 switches, 10 positions
DeviceNet Network Topology

Linear (trunkline/dropline) power and signal on same network cable

Accessories

Description	Compatibility	Avail.	Price
RCBDMFC-1-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$158
RCBDMFC-3-10 Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	8 Weeks	$222
CB1480-1-10 Cable, Mass Flow Controller, Alta, DB15, 10 ft.	UNIVERSAL	8 Weeks	$178
RCBDMFC-4-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	8 Weeks	$244