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Granville-Phillips® 835 Differential Pump System
Overview
The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr.
Specifications
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Mass Range1 to 145 amu or 1 to 300 amu
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Operating Temperature5°C to 40°C (41°F to 104°F)
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Weight10.88 Kg (24 pounds) plus the weight of the gate valve
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Pressure Range3 Torr to 10-5 Torr through orifice, to 5x10-9 Torr through bypass gate valve
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Resolution120 Full Width Half Maximum (FWHM), 180 resolution for the 300 amu system
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Response Time85 ms (1–145 amu) or 120 ms (1-300 amu)
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Dynamic Range2 decades for single scan, 3 or more with averaging
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Exposed Materials304L Stainless Steel, 316L Stainless Steel, Alumina Ceramic, Al2O3 98% Min., Nickel, Molybdenum, Ag/Cu eutectic braze, Gold, Iridium, Yttria, Y2O3 99.95%, Lead Glass (multiplier body), Chromium, Viton, Copper
Resources
Literature
- 835 VQM Differential Pump System (archive) (248.5 kB, PDF)
- 835 Vacuum Quality Monitor System (Archive) (367.1 kB, PDF)
Manuals
- 835 VQM® Differential Pumping System Manual (1.2 MB, PDF)
Ultra-High Velocity