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Pulsed DC Generator, 20 kW, High Frequency, Asymmetric Bipolar
Model: RPDG-200
Pulsed DC Generator, 20 kW, High Frequency, Asymmetric Bipolar
Pulsed DC Generator, 20 kW, High Frequency, Asymmetric Bipolar
Model: RPDG-200
Overview
Overview
The RPDG-200 is a 20.0 kW Asymmetric Bipolar Pulsed DC system that enables deposition of a wide variety of low defect insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPDG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.
Technical Specs
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TypePulsed DC Generator
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Frequency25 - 125 kHz or 50 - 250 kHz
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Duty Cycle0 - 40% (Reverse Bias)
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Power Output20 kW
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Power Limit21 kW for rated 20 kW output, proportional at other power levels
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Current Limit42 Amps
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Regulation ModesVolts, Amps, Watts
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Output Control ModesRamping, Run Time, Joule, Sequence, Constant Run
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DC Linearity/Accuracy Independent of Regulation Mode±0.1%: 10 - 100% of rated output
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DC Linearity/Accuracy in Watts Mode±0.25%: 1 - 10% of rated output
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Line Regulation±0.1% for ±10% line voltage change ±2% line frequency change
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Load Regulation±0.1% for a 4:1 load impedance range
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Line Voltage and CurrentAC Input (3-phase) Max: 200 -208V (-7.5%+10%) 12A 85A, 12A (pulse) 85A (slave), 400V: (±10%) 6A 45A, 6A (pulse) 45A (slave), 480 V: (±10%) 5A 40A, 5A (pulse) 40A (slave)
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Line Frequency50 and 60 Hz, ±2%
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Line-to-Output Efficiency>85%
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Input Power Factor>0.7 at maximum power output
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Fully Functional Front PanelProvides complete control and monitoring from the master unit
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Remote Front PanelProvides complete remote control and monitoring functions
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Blank Front PanelThree LEDs indicate AC On, DC On, and Fault
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Cooling SystemForced air, front panel & right side in, rear panel out
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Weight55 lbs (25kg) per 3U unit
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Dimensions5.22 x 18.9 x 24.8 inches (132.5 x 480 x 631 mm) (height x width x depth) including rack mount & handles
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ComplianceNTRL: Listed: UL 61010-1 and CSA C22.2 No. 61010-1 TUV SUD America, Inc. Certified: EN61010-1/IEC 61010-1, Emissions: EN61000-6-4, Immunity: EN61000-6-2, IEC 68-2-9 test for bump, IEC 68-2-6 test for vibration, IEC 68-2-23 test for bump (certified to meet)
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Operating Temperature5 - 40°C
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Relative Humidity<95% non-condensing
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Maximum Operating Altitude+3500 meters above sea level
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Digital and Analog Interface Connections9-pin Type D with RS232/422 ENI Protocol, 25 pin Analog
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Optional Interface ConnectionsPROFIBUS®, DNET™
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Output ConnectionsUHF female or Terminal Block
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AC Input Connections5 terminal barrier strip
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Interlock Connections2 terminal PC header
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Rack MountingEIA (Standard), Universal JIS Bracket (optional)
Pulsed DC Generator, 20 kW, High Frequency, Asymmetric Bipolar
Ultra-High Velocity