The DA03A is a digital, high temperature Baratron® capacitance manometer. Operating at a high internal temperature, the DA03A minimizes the deposition of process byproducts within the sensor—nearly eliminating output drift caused by such contamination. The DA03A is available in operating temperatures of 150°C and 160°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). The DA03A is completely self-contained, requiring input power of +24 VDC or ±15 VDC for operation. No separate electronics modules are used, which provides the dual benefits of reducing the amount of installation space needed while providing better performance by eliminating noise-generating interconnecting cables. Its Inconel® sensor is resistant to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The integrated high-performance digital electronics of the DA03A also includes a fail-safe over temperature protection and LED status lamp to indicate operating state. It is available with an internally-mounted set of two (2) UL®- approved solid-state trip relays for pressure and one (1) for heater failure that allows the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during set point adjustment.