Specifications

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    100-250 slm (N2 equivalent)
  • Measurement Range
    0.1-100% of Full Scale (range on mech.)
  • Fitting Type
    Compatible with:
    12 mm Swagelok
    0.375 in. Swagelok
    0.5 in. tube compression
    0.5 in. compression long
    0.5 in. NPT female
    8 VCR male
    8 VCO male
    8 VCR male long
    8 VCO male long
    W-Seal
  • Connector
    Profibus (1179B Compatible)
    Profibus (1480 Compatible)
    PROFINET
    15 pin D (Analog 0-5 VDC I/O)
    15 pin D (4-20 mA I/O)
  • Maximum Inlet Pressure
    150 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading (with N2 calibration gas)
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.03% of Reading/psi or less
  • Warm-up Time
    1 hour (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Storage Temperature
    -20 to 65°C (-4 to 149° F)
  • External Leak Integrity
    <1 x 10-9
  • Seal Material
    Viton®
    Buna
    Neoprene®
    EPDM
    Viton (USP Class VI Compliant)
  • Wetted Materials
    316L S.S.
  • Surface Finish
    16μ inch average Ra
  • Enclosure Rating
    IP66
  • Power Requirements
    +15 to +24 VDC @ (<2 watts)
  • Flow Input Output Signal
    Voltage (0-5 VDC)
    Current (4-20 mA)
  • Weight
    <3.4 lbs (1.54 kg)
  • Compliance
    CE

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