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MF1 Compact, Elastomer-sealed 10-50,000 sccm Mass Flow Controller
Model: MF1
MF1 Compact, Elastomer-sealed 10-50,000 sccm Mass Flow Controller
Model: MF1
Overview
Overview
The MF1 Compact, General Purpose Mass Flow Controller (MFC) is rated for flow rates up to 50 slm, with an all-metal sensor. It has multiple features and broad flexibility making it ideal for a wide range of applications and is available in a number of process interfaces (Analog, EtherCAT, Profibus-DP, Modbus/RS485, USB, etc.) for easy and simple compatibility with a wide range of control equipment. The USB interface allows configuration, diagnostics, and even a communication link for non-industrial (laboratory) use. The small 2.8 x 1 inch (77 x 25 mm) footprint enables compact gas supply systems with improved performance compared to existing mass flow controllers. The MF1 MFC employs the latest design in thermal sensors for mass flow measurement, with fast acting proportioning valve and control circuitry for fast settling time. The control valve is normally closed. Mass Flow Meter (MFM) versions of the MF1 are also available. The MF1 Mass Flow Controller is designed to be particularly effective in a wide range of analytical, environmental, PVD, and coating applications.
Technical Specs
- TypeMass Flow Controller/Meter
- Full Scale Flow Range10 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure10 bar(g)
- Normal Operating Pressure Differential10 - 5000 sccm: 0.7 - 2.7 bar (d), 10000 - 20000 sccm: 1.0 - 2.7 bar (d) (with atmospheric pressure at the MFC outlet)
- Proof Pressure10 bar
- Burst Pressure50 bar
- Control Range2 - 100% of Full Scale
- Typical Accuracy±0.5% of reading +0.2% of Full Scale with N2 calibration gas
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.04% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Pressure Coefficient<0.02% of reading/psi
- Typical Settling Time<800 msec (per SEMI Guideline E17-91)
- Warm-up TimeApproximately 15 minutes
- Operating Temperature0 - 40°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature- 20 - 80°C
- Fitting Type4 VCR®, 0.25 in. Swagelok®, 0.125 in. Swagelok®, 4 VCO®, 6 mm Swagelok®, DN 16 KF, MKS Surface Mount
- External Leak Integrity<1 x 10-9 mbar l/sec (He) (scc/sec He)
- Leak Integrity Through Closed Valve<1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required - MFC only)
- Wetted MaterialsStandard: 1.4301 stainless steel (V2A, ANSI 304), FKM, Nickel, Optional: NBR, FFKM (seals and valve seal)
- Surface Finish6.3 µ Rz
- Seal MaterialFKM, NBR, or FFKM
- Set Point Command SignalConfigurable, Default: 0 - 5 VDC, Zero: 0 to 2 VDC, Full Scale: 5 - 10 VDC (Analog interface versions only)
- Power Requirements20.5 - 30 VDC, maximum 300 mA
- Flow Input Output SignalConfigurable, Default: 0 - 5 VDC, Zero: 0 to 2 VDC, Full Scale: 5 to 10VDC (Analog interface versions only)
- Analog I/O Connector9-pin D-sub or 15-pin D-sub
- Power ConnectorStandard Industrial Terminal, 3.81 mm pitch (Phoenix Contact MC - series, 3.81 mm pitch)
- Setup ConnectorUSB micro - B
- InterfaceAnalog, PROFIBUS-DPV, Modbus, RS485, USB, EtherCAT, PROFINET, Modbus TCP, or RJ45
- Profibus Connector9-pin D-sub socket
- EtherCAT Connector2 x RJ45
- Modbus Connector9-pin D-sub socket or 2x RJ45
- PROFINET Connector2x RJ45
- Weightapproximately 0.7 kg (1.6 lbs)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller/Meter
- Full Scale Flow Range10 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure10 bar(g)
- Normal Operating Pressure Differential10 - 5000 sccm: 0.7 - 2.7 bar (d), 10000 - 20000 sccm: 1.0 - 2.7 bar (d) (with atmospheric pressure at the MFC outlet)
- Proof Pressure10 bar
- Burst Pressure50 bar
- Control Range2 - 100% of Full Scale
- Typical Accuracy±0.5% of reading +0.2% of Full Scale with N2 calibration gas
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.04% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Pressure Coefficient<0.02% of reading/psi
- Typical Settling Time<800 msec (per SEMI Guideline E17-91)
- Warm-up TimeApproximately 15 minutes
- Operating Temperature0 - 40°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature- 20 - 80°C
- Fitting Type4 VCR®, 0.25 in. Swagelok®, 0.125 in. Swagelok®, 4 VCO®, 6 mm Swagelok®, DN 16 KF, MKS Surface Mount
- External Leak Integrity<1 x 10-9 mbar l/sec (He) (scc/sec He)
- Leak Integrity Through Closed Valve<1 x 10-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required - MFC only)
- Wetted MaterialsStandard: 1.4301 stainless steel (V2A, ANSI 304), FKM, Nickel, Optional: NBR, FFKM (seals and valve seal)
- Surface Finish6.3 µ Rz
- Seal MaterialFKM, NBR, or FFKM
- Set Point Command SignalConfigurable, Default: 0 - 5 VDC, Zero: 0 to 2 VDC, Full Scale: 5 - 10 VDC (Analog interface versions only)
- Power Requirements20.5 - 30 VDC, maximum 300 mA
- Flow Input Output SignalConfigurable, Default: 0 - 5 VDC, Zero: 0 to 2 VDC, Full Scale: 5 to 10VDC (Analog interface versions only)
- Analog I/O Connector9-pin D-sub or 15-pin D-sub
- Power ConnectorStandard Industrial Terminal, 3.81 mm pitch (Phoenix Contact MC - series, 3.81 mm pitch)
- Setup ConnectorUSB micro - B
- InterfaceAnalog, PROFIBUS-DPV, Modbus, RS485, USB, EtherCAT, PROFINET, Modbus TCP, or RJ45
- Profibus Connector9-pin D-sub socket
- EtherCAT Connector2 x RJ45
- Modbus Connector9-pin D-sub socket or 2x RJ45
- PROFINET Connector2x RJ45
- Weightapproximately 0.7 kg (1.6 lbs)
- ComplianceCE
Resources & Downloads
Drawings & CADs
MF1 Mass Flow Controller Dimensional Drawing(130.7 kB, PDF)