Specifications

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    100-250 slm (N2 equivalent)
  • Fitting Type
    12 mm Swagelok
    0.375 in. Swagelok
    0.5 in. tube compression
    0.5 in. compression long
    0.5 in. NPT female
    8 VCR male
    8 VCO male
    8 VCR male long
    8 VCO male long
    W-Seal
  • Connector
    Profibus (1179B Compatible)
    Profibus (1480 Compatible)
    PROFINET
    15 pin D (Analog 0-5 VDC I/O)
    15 pin D (4-20 mA I/O)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    30-55 psid
  • Burst Pressure
    1500 psig
  • Control Range
    2-100% of Full Scale
  • Typical Accuracy
    ±1% of set point for >20% to 100% Full Scale
    ±0.25% of Full Scale for 5% to 20% Full Scale
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Reading
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Rdg./°C
  • Inlet Pressure Coefficient
    <0.03% of Reading
  • Typical Settling Time
    1 to 2 seconds typical above 10% Full Scale @ 50 psi
  • Warm-up Time
    1 hour
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 65°C
  • External Leak Integrity
    <1 x 10-9 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% Full Scale at 40 psia to vac (<500 mTorr)
  • Seal Material
    Viton®
    Buna
    Neoprene®
    EPDM
    Viton (USP Class VI Compliant)
  • Wetted Materials
    316 S.S., 17-1 S.S., Elgiloy, 430FR (Standard)
  • Surface Finish
    16 µinch average Ra
  • Enclosure Rating
    IP66
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    Voltage: 0 to 5 VDC
    Current: 4 to 20 mA
  • Weight
    4.5 lbs. (2.05 kg)
  • Compliance
    CE

Resources

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