Mass Spectrometry/RGA Parts & Accessories
Mass Spectrometry/RGA Parts & Accessories
MKS offers a selection of mass spectrometry replacement parts to maintain and optimize analytical instrument performance.
To verify compatibility with specific RGA models, consult the “compatibility chart" below.
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | 842-002Closed Ion Source, Thoria Filament, 2 Filaments on One Plate, for 5xx Analysers | In Stock | ||||
 | 842-023Open Ion Source, Tungsten Filament, 2 Filaments on One Plate | In Stock | ||||
 | 842-024Open Ion Source, Thoria Filament, 2 Filaments on One Plate | |||||
 | 842-042Open Ion Source, Tungsten Filaments | |||||
 | 842-043Open Ion Source with Thoria Filaments | |||||
 | 842-045PVD Ion Source with Tungsten Filaments | |||||
 | 842-060Closed Ion Source, Tungsten Filament, 2 Filaments on One Plate, for 5xx Analysers | |||||
 | 842-061PVD Off Axis Ion Source, Tungsten Filaments | In Stock | ||||
 | 842-066KLA Filament Kit, with Gasket, Trim Tool, and Hardware | In Stock | ||||
 | 842-070HPQ Filament, Tungsten, 2 Filaments on One Plate | In Stock |
Features
Compatibility Chart:
| Part SKU: | Type | Compatable with analyser serial numbers starting with: |
|---|---|---|
| 842-002 | Closed Ion Source | LM2-, LM22-, LM505-, LM501-, LM500-, MKS2, MKS4, MKS5,MKS6, MKS7,MKSC,MKSE, MKSF, MKSG |
| 842-023 | Open Ion Source | MKS-0,MKS1,MKS3, MKSA, MKSB |
| 842-024 | Open Ion Source | MKS-0,MKS1,MKS3, MKSA, MKSB |
| 842-060 | Closed Ion Source | LM2-, LM22-, LM505-, LM501-, LM500-, MKS2, MKS4, MKS5,MKS6, MKS7,MKSC,MKSE, MKSF, MKSG |
| 842-066 | KLA Filament Kit | MKSJ32 |
| 842-070 | HPQ Tungsten Filament | LM506-, MKS506- |
| 842-071 | HPQ Thoria Filament | LM506-, MKS506- |
| 842-042 | Open ion source | MKS0 |
| 842-043 | Open ion source | MKS0 |
| 842-045 | PVD Ion Source | MKS4 |
| 842-061 | PVD Off Axis Ion Source | MKSE |
| 842-081 | HPQ Ion Source | LM506-, MKS506- |