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  5. 179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters

179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters

Model: 179c-mass-flow-meter

179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters

Model: 179c-mass-flow-meter

179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm

Technical Specs

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
  • Fitting Type
    Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
  • Analog I/O Connector
    9-pin or 15-pin Type "D"
  • Maximum Inlet Pressure
    500 psig
  • Normal Operating Pressure Differential
    10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    2 minutes
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ±15 VDC (150 mA start-up, 50 mA steady-state)
  • Wetted Materials
    316L S.S.
  • External Leak Integrity
    < 1 x 10-9
  • Compliance
    CE

Technical Specs

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
  • Fitting Type
    Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
  • Analog I/O Connector
    9-pin or 15-pin Type "D"
  • Maximum Inlet Pressure
    500 psig
  • Normal Operating Pressure Differential
    10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    2 minutes
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ±15 VDC (150 mA start-up, 50 mA steady-state)
  • Wetted Materials
    316L S.S.
  • External Leak Integrity
    < 1 x 10-9
  • Compliance
    CE

Resources & Downloads

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