1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller
Model: 1179c-mass-flow-controller
1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller
Model: 1179c-mass-flow-controller
Technical Specs
Control Range
2% to 100% of Full Scale
Full Scale Flow Range
10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type
Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Analog I/O Connector
9-pin or 15-pin Type "D"
Seal Material
Buna-N, Neoprene®, Kalrez®
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet)
Typical Accuracy
±1.0% of Full Scale
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading./°C
Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
2 minutes
Typical Settling Time
<2 sec
Operating Temperature
0° to 50°C
Power Requirements
±15 VDC (200 mA start-up, 100 mA steady-state)
Set Point Command Signal
0 to 5 VDC from <20K Ω
Wetted Materials
316L S.S., Viton®, nickel
External Leak Integrity
< 1 x 10-9
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Compliance
CE
Technical Specs
Control Range
2% to 100% of Full Scale
Full Scale Flow Range
10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type
Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Analog I/O Connector
9-pin or 15-pin Type "D"
Seal Material
Buna-N, Neoprene®, Kalrez®
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet)
Typical Accuracy
±1.0% of Full Scale
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading./°C
Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
2 minutes
Typical Settling Time
<2 sec
Operating Temperature
0° to 50°C
Power Requirements
±15 VDC (200 mA start-up, 100 mA steady-state)
Set Point Command Signal
0 to 5 VDC from <20K Ω
Wetted Materials
316L S.S., Viton®, nickel
External Leak Integrity
< 1 x 10-9
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Compliance
CE
Resources & Downloads
Drawings & CADs
Application Notes
