Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
Model: 1179C01351CR1BV
Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
Model: 1179C01351CR1BV
Overview
Overview
The 1179C01351CR1BV is a general purpose mass flow controller with an Viton seal, rated for 50 sccm Full Scale (N2), with 4 VCR male fittings, and a 15-pin D-sub electrical connector. It is designed to measure and control the flow of gases in a wide variety of applications. 1179 Mass-Flo® controllers can also be used as a pressure controller when connected to a suitable pressure transducer. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.
Technical Specs
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TypeMass Flow Controller
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Calibration GasN2Â (or equivalent)
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Control Range0.1 - 50 sccm
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Full Scale Flow Range50 sccm
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Fitting Type4 VCR male
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Flow Input Output Signal0 - 5 VDC
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Analog I/O Connector15-pin D-sub
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Seal MaterialViton
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Maximum Inlet Pressure150 psig
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Normal Operating Pressure Differential10 - 40 psid (with atmospheric pressure at the MFC outlet)
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Typical Accuracy±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
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Repeatability<0.05% of Full Scale/°C
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Resolution<0.08% of Reading/°C
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Zero Temperature Coefficient<0.05% of Full Scale/°C
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Span Temperature Coefficient<0.08% of Reading/°C
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Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
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Typical Settling Time<2 sec (per SEMI Guideline E17-91)
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Operating Temperature0 - 50°C
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Set Point Command Signal0 - 5 VDC from <20 kOhm
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Wetted Materials316L stainless steel, Viton®, nickel
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External Leak Integrity<1 x 10-9
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Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
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ComplianceCE
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Maximum Current Required at Start-up±15 VDC (±5%) @ 200 mA
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Typical Current Required at Steady State±15 VDC (±5%) @ 100 mA
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Valve StateNormally closed
Resources & Downloads
Drawings & CADs
- 1179C Dimensional Drawing (54.6 kB, PDF)
Mass Flow Controller, 50 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
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