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NOVA® 2 MHz RF Plasma Generators
Overview
NOVA® Series RF power generators deliver rated output powers of 2,500 or 5,000 Watts at a frequency of 2 MHz. The NOVA Series generators offer advanced RF plasma generation and control for low cost and high yield in the most demanding thin film processing applications. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
Specifications
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TypeRF Plasma Generator
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Frequency Tuning Range2.00 MHz ±0.005%
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Load Impedance RangeUnlimited
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RF Stability/Spurious OutputUnconditionally stable for any load within operational limits <-50dBc
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Harmonic Output & Distortion<-40dBc
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Load Mismatch ProtectionAutomatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
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Regulation Tolerance>500 W: <2.0% SP
<500 W: ±5.0 W -
Input AC Power200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
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RF ConnectorType HN
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ReadoutDigital readout displays frequency and forward, reflected and load power.
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Remote Digital InterfaceStandard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.
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Rack Mounting19-inch adapters supplied
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Cooling SystemWater flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.
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Dimensions8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)
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Weight91 lbs (41.3 kg)
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ComplianceCE, UL 3111-1, CAN/CSA-C22.2 No.1010.1-92
Ultra-High Velocity