Specifications

  • Type
    RF Plasma Generator
  • Frequency Tuning Range
    2.00 MHz ±0.005%
  • Load Impedance Range
    Unlimited
  • RF Stability/Spurious Output
    Unconditionally stable for any load within operational limits <-50dBc
  • Harmonic Output & Distortion
    <-40dBc
  • Load Mismatch Protection
    Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
  • Regulation Tolerance
    >500 W: <2.0% SP
    <500 W: ±5.0 W
  • Input AC Power
    200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
  • RF Connector
    Type HN
  • Readout
    Digital readout displays frequency and forward, reflected and load power.
  • Remote Digital Interface
    Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.
  • Rack Mounting
    19-inch adapters supplied
  • Cooling System
    Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.
  • Dimensions
    8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)
  • Weight
    91 lbs (41.3 kg)
  • Compliance
    CE, UL 3111-1, CAN/CSA-C22.2 No.1010.1-92

Resources

Need help?

Contact an Applications Specialist by sending us an email