High Vacuum Ball Valves
High Vacuum Ball Valves
MKS offers a full suite of 2 and 3-way high vacuum ball valves with either manual or pneumatic actuation. 2-way Vacuum Isolation Ball Valves are designed to have the ball contained in a central vacuum cavity and is opened and closed by turning the stem 90° back and forth (1/4 turn). Flow through a 3-way valve is diverted manually or pneumatically by quarter turn as well. During actuation, the Teflon seats wipe across the ball, reducing particulate build-up and making these valves robust in particle-rich effluent streams and particularly useful in "dirty" vacuum applications.
- NW16 - NW100
- Designed with straight-through flow paths and less sensitive to contamination
- 2-way and 3-way ports See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | 100015828High Vacuum Ball Valve, 2-way, Manual, NW16 Port, ISO-KF Flange | |||||
 | 100015830High Vacuum Ball Valve, 2-way, Pneumatic, NW16 Port, ISO-KF Flange | 4 Weeks | ||||
| 100015831High Vacuum Ball Valve, 2-way, Manual, NW25 Port, ISO-KF Flange | 4 Weeks | ||||
| 100015833High Vacuum Ball Valve, 2-way, Pneumatic, NW25 Port, ISO-KF Flange | |||||
| 100015777High Vacuum Ball Valve, 2-way, Manual, NW40 Port, ISO-KF Flange | 8 Weeks | ||||
| 100015778High Vacuum Ball Valve, 2-way, Pneumatic, NW40 Port, ISO-KF Flange | 6 Weeks | ||||
| 100016318High Vacuum Ball Valve, 2-way, Manual, NW50 Port, ISO-KF Flange | |||||
| 100016319High Vacuum Ball Valve, 2-way, Pneumatic, NW50 Port, ISO-KF Flange | 4 Weeks | ||||
| BALL-33893High Vacuum Ball Valve, 2-way, Manual, NW63 Port, ISO-MF Flange | |||||
| BALL-33894High Vacuum Ball Valve, 2-way, Pneumatic, NW63 Port, ISO-MF Flange | 15 Weeks | ||||
| BALL-33896High Vacuum Ball Valve, 2-way, Manual, NW80 Port, ISO-MF Flange | |||||
| BALL-33897High Vacuum Ball Valve, 2-way, Pneumatic, NW80 Port, ISO-MF Flange | 15 Weeks | ||||
| BALL-33899High Vacuum Ball Valve, 2-way, Manual, NW100 Port, ISO-MF Flange | |||||
| BALL-33900High Vacuum Ball Valve, 2-way, Pneumatic, NW100 Port, ISO-MF Flange | 15 Weeks | ||||
 | BALL-33408High Vacuum Ball Valve, 3-Way, Manual, KF40 | 6 Weeks | ||||
 | BALL-33412High Vacuum Ball Valve, 3-Way, Pneumatic, KF40 | 15 Weeks | ||||
| BALL-33416High Vacuum Ball Valve, 3-Way, Manual, KF50 | |||||
| BALL-33420High Vacuum Ball Valve, 3-Way, Pneumatic, KF50 |
Specifications
- TypeBall Valve
- Vacuum Range3 Way Valve: Rated to 1 x 10-8 Torr
- Helium Leak Rate2 Way Valve: Less than 1 X 10-9 std.cc/sec.
3 Way Valve: Rated < 1 x 10^-9 std. ss/sec - Body Materials316L Stainless Steel
- Seal2 Way Valve: Stem: Viton® stem seal
3 Way Valve: Fluoroelastomer
(standard - Other material available) - SeatTeflon® (standard - Other material available)
- Lubricant3 Way Valve: Dow Corning® High Vacuum Grease
- Solenoid Voltage3 Way Valve: 120VAC, 240VAC or 24VDC
- Actuator Operating Pressure3 Way Valve: 80-120 psig (pneumatic valves)
- Maximum Bakeout Temperature150°C
- Connection Ports0.75 - 4.0 inches
- Actuation Options2-Way Valve: Manual, Air-Open, Spring-Close (Air-Close, Spring-Open), Air-Open, Air-Close (Call for Availability)
3 Way Valve: Single Acting: Air-to-Open, Spring-to-Close, Double Acting: Air-to-Open, Air-to-Close - Actuator Temperature Range3 Way Valve: Moist Air: 0 to 150°C (32 to 302°F)
Dry Air: -20 to 150°C (-4 to 302°F) - Air Line Hook-up3 Way Valve: 1/8 NPT
- Maximum Operating Temperature150°C
Resources
Literature
2-Way High Vacuum Ball Valves(250.8 kB, PDF) 3-Way High Vacuum Ball Valves(267.5 kB, PDF)
