GE50A Elastomer-sealed 5-50,000 sccm Mass Flow Controllers

Model: ge50a-mass-flow-controller

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Type
Mass Flow Controller
Full Scale Flow Range
5 - 50,000 sccm
Control Range
2% to 100% of Full Scale
Seal Material
Viton, Buna-N, Neoprene, or Kalrez
Analog Connector
9-pin or 15-pin D-subminiture
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C

Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10°C to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-09 (scc/sec He)
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
16µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE

Type
Mass Flow Controller
Full Scale Flow Range
5 - 50,000 sccm
Control Range
2% to 100% of Full Scale
Seal Material
Viton, Buna-N, Neoprene, or Kalrez
Analog Connector
9-pin or 15-pin D-subminiture
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C

Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10°C to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-09 (scc/sec He)
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
16µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE

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