The RPS-CH24P1, 24 kW remote plasma source is designed for use with larger Atomic Layer Deposition (ALD) and Quad-style Chemical Vapor Deposition (CVD) chambers used in Semiconductor, Flat Panel Display, or Photovoltaic (PV) processes. A split-powered DC/RF design consisting of a rack mounted DC power supply and a 24 kW RF remote toroidal applicator head provides highly efficient destruction of NF3 molecules for chamber clean applications or high flow mixed gas species applications.
Additional CAD file downloads are not available for this product.
RPS-CH24P1-P24C - Drawings
Additional drawings are not available for this product.
RPS-CH24P1-P24C
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Remote Plasma Source, 24 kW, High Flow Applications