RPS-CH24P1 Remote Plasma Source for High Flow Applications
Model: RPS-CH24P1-P24C
RPS-CH24P1 Remote Plasma Source for High Flow Applications
Model: RPS-CH24P1-P24C
Overview
Overview
The RPS-CH24P1, 24 kW remote plasma source is designed for use with larger Atomic Layer Deposition (ALD) and Quad-style Chemical Vapor Deposition (CVD) chambers used in Semiconductor, Flat Panel Display, or Photovoltaic (PV) processes. A split-powered DC/RF design consisting of a rack mounted DC power supply and a 24 kW RF remote toroidal applicator head provides highly efficient destruction of NF3 molecules for chamber clean applications or high flow mixed gas species applications.
Technical Specs
- TypeRPS-CH24P1 Remote Plasma Source
- Power Output24 kW
- RF Frequency400 kHz
- Accuracy±1% to power set point
- Gas Supply During IgnitionAr
- NF3 Process Gas1- 50 slm, 20-50 T
- NF3 Operation Reactant Output1-25 slm 20T
- Compatible SpeciesNF3, O2, N2, Ar
- Mixed Species Space30-90 slm
- THD<15%
- Inlet Gas ConnectionKF40
- Outlet Gas ConnectionKF50
- Cooling Water RequiredRemote Head: 3 gpm (11.36 Lpm)
DC Power Supply: 2 gpm (7.57 Lpm) - Control InterfaceAnalog: DB25
Digital: EtherCAT - Power Requirements208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase
- DimensionsRemote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)
Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm) - WeightRemote Head: 100 lbs. (45.36 kg)
Power Supply: 62 lbs. (28.12 kg) - ComplianceSEMI F47
Technical Specs
- TypeRPS-CH24P1 Remote Plasma Source
- Power Output24 kW
- RF Frequency400 kHz
- Accuracy±1% to power set point
- Gas Supply During IgnitionAr
- NF3 Process Gas1- 50 slm, 20-50 T
- NF3 Operation Reactant Output1-25 slm 20T
- Compatible SpeciesNF3, O2, N2, Ar
- Mixed Species Space30-90 slm
- THD<15%
- Inlet Gas ConnectionKF40
- Outlet Gas ConnectionKF50
- Cooling Water RequiredRemote Head: 3 gpm (11.36 Lpm)
DC Power Supply: 2 gpm (7.57 Lpm) - Control InterfaceAnalog: DB25
Digital: EtherCAT - Power Requirements208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase
- DimensionsRemote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)
Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm) - WeightRemote Head: 100 lbs. (45.36 kg)
Power Supply: 62 lbs. (28.12 kg) - ComplianceSEMI F47
Resources & Downloads
Drawings & CADs
RPS-CH24P1 Remote Plasma Source Dimensional Drawings(387 kB, PDF)