Technical Specs

  • Digital Communication
    RS485/RS232 (4800 to 230400 Baud)
  • Sensor
    MicroPirani™ (MEMS Thermal Conductivity)
  • Relays
    3 relays SPDT(Optional)
  • Installation Orientation
    Any
  • Measurement Range
    1.0 x 10-5 Torr to Atmosphere
  • Set Point Range
    5.0 x 10-4 Torr to 500 Torr
  • Calibration Gas
    Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, xenon, Neon
  • Operating Temperature
    0° to 40°C (32° to 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Zero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type; set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
  • Digital Status
    Pressure reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
  • Analog Output
    1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade
  • Analog Output Resolution
    16 bit
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Relay Response
    <100 msec maximum
  • Power Requirements
    9 to 30 VDC, < 1.5 watts max
  • Accuracy
    5 x 10-4 to 10-3 Torr ±10% of reading
    10-3 to 100 Torr ±5% of reading
    100 Torr to atm ±25% of reading
  • Repeatability
    10-3 to 100 Torr ± 2% of reading
  • Overpressure Limit
    3000 Torr absolute
  • Internal Volume
    (KF16) 2.80 cc
  • Exposed Materials
    304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy resin
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    170 g (KF 16)
  • Compliance
    CE

Technical Specs

  • Digital Communication
    RS485/RS232 (4800 to 230400 Baud)
  • Sensor
    MicroPirani™ (MEMS Thermal Conductivity)
  • Relays
    3 relays SPDT(Optional)
  • Installation Orientation
    Any
  • Measurement Range
    1.0 x 10-5 Torr to Atmosphere
  • Set Point Range
    5.0 x 10-4 Torr to 500 Torr
  • Calibration Gas
    Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, xenon, Neon
  • Operating Temperature
    0° to 40°C (32° to 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Zero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type; set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
  • Digital Status
    Pressure reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
  • Analog Output
    1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade
  • Analog Output Resolution
    16 bit
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Relay Response
    <100 msec maximum
  • Power Requirements
    9 to 30 VDC, < 1.5 watts max
  • Accuracy
    5 x 10-4 to 10-3 Torr ±10% of reading
    10-3 to 100 Torr ±5% of reading
    100 Torr to atm ±25% of reading
  • Repeatability
    10-3 to 100 Torr ± 2% of reading
  • Overpressure Limit
    3000 Torr absolute
  • Internal Volume
    (KF16) 2.80 cc
  • Exposed Materials
    304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy resin
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    170 g (KF 16)
  • Compliance
    CE

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