AX8415 Ultra High Concentration, High Flow Ozone Generator

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Overview

The AX8415 is the most innovative and versatile ozone generator developed by MKS. Ultra clean, ultra high concentration, high flow ozone is produced by this generator’s novel architecture and patented cell design, converting oxygen to > 400 g/Nm³ of high concentration ozone for leading-edge applications in the semiconductor, flat panel display, and photovoltaic industries. The technology designed into the AX8415 is the basis of this generator’s versatility. Product Features Ozone is used in the formation of CVD and ALD thin films, oxide growth, photoresist removal, and multiple cleaning applications. The AX8415 has the capability to support all these applications by producing the highest concentrations of ultra clean ozone with or without the addition of nitrogen as a dopant gas. Removing the minute amount of nitrogen used in the formation of ozone eliminates the formation of NOx compounds, if required for a given application.

Ozone concentration up to 425 g/Nm3 or 27.1 wt% at 5°C @ 2.5 slm
O2 flow rate from 2.5 slm to 50 slm enables process flexibility
Patented cell design enables production of high concentration ozone
Operational with or without the addition of nitrogen
Closed-loop operation for tighter process control
Direct replacement for MKS AX8407 ozone generator

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Pressure	Ozone Output	Flow Rate	Availability	Featured Item	Price		Brand
		AX8415 Ozone Gas Generator, 2.5 - 50 slm, Ultra Clean, High Concentration, High Flow 6 Weeks	AX8415 Ozone Gas Generator, 2.5 - 50 slm, Ultra Clean, High Concentration, High Flow	UNIVERSAL	0.0	1.0	0.0		0.0	Ozone Gas Generator	20 - 50 psig	up to 425 g/Nm³ (27.1 wt%)	2.5 - 50 slm	6 Weeks

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Specifications

Type

Ozone Gas Generator
Ozone Output

up to 425 g/Nm³
Flow Rate

2.5 - 50 slm
Feed Gas

Oxygen: Grade 6 or better O2
Nitrogen (Optional): 100 ppm Grade 5 or better N2
Ambient Temperature

10 - 40°C (50 - 104°F)
Nominal Cell Pressure (Delivery)

15 - 45 psig (100 - 310 kPa)
Pressure

Maintain process pressure at 20 - 50 psig
Control Interface

Front panel control and remote operation
Cooling Water Temperature

5 - 25°C (41 - 77°F)

Cooling Water Filtration

100 microns
Cooling Water Quality

Resistivity ≥ 50 kΩ/cm
Minimum Water Flow

9.4 lpm (2.5 gpm)
Voltage Requirements

208 VAC (±10%) 3Ø & GND, no neutral
Current Requirements

20 Amp
Frequency

50/60 Hz
Weight

46.3 kg (102 lbs)
Dimensions

483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)
Compliance

CE, SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1

Specifications

Type

Ozone Gas Generator
Ozone Output

up to 425 g/Nm³
Flow Rate

2.5 - 50 slm
Feed Gas

Oxygen: Grade 6 or better O2
Nitrogen (Optional): 100 ppm Grade 5 or better N2
Ambient Temperature

10 - 40°C (50 - 104°F)
Nominal Cell Pressure (Delivery)

15 - 45 psig (100 - 310 kPa)
Pressure

Maintain process pressure at 20 - 50 psig
Control Interface

Front panel control and remote operation
Cooling Water Temperature

5 - 25°C (41 - 77°F)

Cooling Water Filtration

100 microns
Cooling Water Quality

Resistivity ≥ 50 kΩ/cm
Minimum Water Flow

9.4 lpm (2.5 gpm)
Voltage Requirements

208 VAC (±10%) 3Ø & GND, no neutral
Current Requirements

20 Amp
Frequency

50/60 Hz
Weight

46.3 kg (102 lbs)
Dimensions

483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)
Compliance

CE, SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1

Features

Highest Concentrations of Ultra Clean Ozone

The technology designed into the AX8415 is the basis of this generator’s versatility. Ozone is used by the electronics industry in the formation of CVD and ALD thin films, oxide growth, photoresist removal and multiple cleaning applications. The AX8415 has the capability to support all these applications by producing the highest concentrations of ultra clean ozone with or without the addition of nitrogen as a dopant gas. Removing the minute amount of nitrogen used in the formation of ozone eliminates the formation of NOx compounds, if required for a given application.

Direct Replacement for AX8407

The unique features and benefits of the AX8415 position it as a direct replacement for the industry leading AX8407 ozone generator. The form factor and connections required to produce and control ozone generation on the AX8415 are exactly the same as the AX8407. The superior performance of AX8415 is immediately available for all applications qualified with the AX8407 ozone generator.