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  5. MC20A Digital Metal-sealed 200 slm Mass Flow Controllers

Sorry, this product is no longer offered for sale. For recommended replacements see mass-flow-controllers.  

MC20A Digital Metal-sealed 200 slm Mass Flow Controllers

Model: mc20a-mass-flow-meter

MC20A Digital Metal-sealed 200 slm Mass Flow Controllers

Model: mc20a-mass-flow-meter

mc20a digital metal-sealed 200 slm mass flow controllers

Technical Specs

  • Fitting Type
    Swagelok® 4 VCR® male (50 slm)
    Swagelok® 8 VCR® male (50, 100, 200 slm)
  • Analog I/O Connector
    15-pin Type "D"
  • Power Requirements
    ±15 VDC (9 Watts)
  • Set Point Command Signal
    0 to 5 VDC
  • Wetted Materials
    316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
  • Valve Seat Material
    Viton®, Buna-N, Kalrez®
  • External Leak Integrity
    < 1 x 10-10
  • Leak Integrity Through Closed Valve
    <1.0% of F.S. at 25 psig to vacuum
  • Compliance
    16µ inch average Ra
  • Weight
    2 lbs (0.9 kg)
  • DeviceNet Network Size
    Up to 64 nodes
  • DeviceNet MAC ID Switches Addresses
    2 switches, 10 positions
  • DeviceNet Network Topology
    Linear (trunkline/dropline) power and signal on same network cable

Technical Specs

  • Fitting Type
    Swagelok® 4 VCR® male (50 slm)
    Swagelok® 8 VCR® male (50, 100, 200 slm)
  • Analog I/O Connector
    15-pin Type "D"
  • Power Requirements
    ±15 VDC (9 Watts)
  • Set Point Command Signal
    0 to 5 VDC
  • Wetted Materials
    316L S.S. VAR, 316L S.S., Elgiloy®, Nickel
  • Valve Seat Material
    Viton®, Buna-N, Kalrez®
  • External Leak Integrity
    < 1 x 10-10
  • Leak Integrity Through Closed Valve
    <1.0% of F.S. at 25 psig to vacuum
  • Compliance
    16µ inch average Ra
  • Weight
    2 lbs (0.9 kg)
  • DeviceNet Network Size
    Up to 64 nodes
  • DeviceNet MAC ID Switches Addresses
    2 switches, 10 positions
  • DeviceNet Network Topology
    Linear (trunkline/dropline) power and signal on same network cable

Resources & Downloads

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