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R*evolution® III 6 slm Remote Plasma Source
Model: AX7695
R*evolution® III 6 slm Remote Plasma Source
Model: AX7695
Overview
Overview
The R*evolution® III integrated remote plasma source provides reactive gas required for semiconductor wafer processing. AX7695 integrates a quartz vacuum chamber, RF power supply and all necessary controls into a compact, self-contained unit for easy installation directly on the tool process chamber for an extremely clean, low cost source of atomic radicals to bring about the desired reaction on the wafer, at a reduced level of complexity.
Technical Specs
- TypeRemote Plasma Source
- Ignition Gas Supply100% O2 or Ar, or 90% O2/10% N2
- Process Gas SupplyUp to 6.0 slm of 100% O2, or 90% O2/10% N2
- Operating Pressure0.5 - 2.0 Torr @ 1.0 - 6.0 slm
- OutputUp to 6 slm radicals
- InputsPlasma On/Off, Power Set
- OutputsReady, AC line, Plasma On, Power Monitor
- Duty Cycle100%
- InterlocksInternal thermal switch and internal water flow switch to protect against insufficient cooling
- Wetted Materials6061-T6 Aluminum, Kalrez, SiO2, 316L SS, Nickel, Fluorosilicone
- Control InterfaceDiscrete I/O, 9 and 25 pin D connectors, RS-232, DeviceNet and Ethernet (MKS TOOLweb-enabled)
- Power Requirements180 to 228 VAC, 50/60 Hz, 30A, 3 phase
- Cooling Water1.75 gpm, <30°C
- Operating Temperature40°C max.
- Dimensions15.7 x 13.7 x 12.14 in. (399 x 348 x 308 mm nominal)
- Weight85 lb. (38.6 Kg)
- ComplianceSemi S2-0703 (includes S8, S10), CE EMC (EN55011, EN61326), NRTL (UL 61010A-1, CSA 22.2 No. 1010.1), Semi F47-0200 Voltage Sag Immunity
Technical Specs
- TypeRemote Plasma Source
- Ignition Gas Supply100% O2 or Ar, or 90% O2/10% N2
- Process Gas SupplyUp to 6.0 slm of 100% O2, or 90% O2/10% N2
- Operating Pressure0.5 - 2.0 Torr @ 1.0 - 6.0 slm
- OutputUp to 6 slm radicals
- InputsPlasma On/Off, Power Set
- OutputsReady, AC line, Plasma On, Power Monitor
- Duty Cycle100%
- InterlocksInternal thermal switch and internal water flow switch to protect against insufficient cooling
- Wetted Materials6061-T6 Aluminum, Kalrez, SiO2, 316L SS, Nickel, Fluorosilicone
- Control InterfaceDiscrete I/O, 9 and 25 pin D connectors, RS-232, DeviceNet and Ethernet (MKS TOOLweb-enabled)
- Power Requirements180 to 228 VAC, 50/60 Hz, 30A, 3 phase
- Cooling Water1.75 gpm, <30°C
- Operating Temperature40°C max.
- Dimensions15.7 x 13.7 x 12.14 in. (399 x 348 x 308 mm nominal)
- Weight85 lb. (38.6 Kg)
- ComplianceSemi S2-0703 (includes S8, S10), CE EMC (EN55011, EN61326), NRTL (UL 61010A-1, CSA 22.2 No. 1010.1), Semi F47-0200 Voltage Sag Immunity