TEOS Process Traps
Overview
Our TEOS process traps when used as one element of a TEOS Effluent Management Subsystem™, have proven very effective in reducing particulates and increasing uptime. TEOS traps collect TEOS byproducts, preventing them from backstreaming into the furnace and contaminating the pump. In test cases, a greater than 20% reduction in particulates has been recorded.
- Improve wafer yields when used as part of a TEOS Effluent Management Subsystem
- Overall yield improvement of 2-3%
- Greater than 20% particle reduction
- Easy cleaning and maintenance of Trap
- Increases uptime, reduces downtime
Products
Configuration Options
TEOS Process Traps are available with the following options.
|
Configuration Option |
Option Code |
|---|---|
| TEOS Process Trap | TSTRP |
| Body Size | |
| 6 in. Body (NW50 & NW80 only) | 6 |
| 8 in. Body (NW80 & NW100 only) | 8 |
| Port Size | |
| NW50 | 050 |
| NW80 | 080 |
| NW100 | 100 |
| Configuration | |
| Angle | A |
| Inline | I |
| Flange | |
| ISO-KF (NW50 only) | K |
| ISO-MF (NW80 and NW100 only) | M |
| Seal Type | |
| Viton® | V |
| Kalrez® | K |
Features
TEOS Trap Applications
Low-pressure chemical vapor deposition using TEOS (tetraethylorthosilicate, Si(OC2H5)4) is a popular precursor for the deposition of silicon dioxide as an interlayer dielectric film. The use of TEOS does create problems on the downside of the process chamber in the vacuum pump lines. TEOS and its byproducts have a propensity to clog the vacuum pump line with solid and viscous-liquid effluent byproducts. This increases particle levels, impedes gas flow, and can cause catastrophic pump failure.
Simplified Maintenance
Maintenance is simplified, by cleaning a single component versus many feet of piping. The large trapping capacity leads to longer preventative maintenance cycles. The high trapping efficiency provides better protection to the pump, valves and other downstream instrumentation.
Resources
Literature
- TEOS Trap Datasheet (184.2 kB, PDF)
Ultra-High Velocity