Sorry, this product is no longer offered for sale. The recommended replacement product is t-series-ir-gas-analyzer.

Process Sense™ TFS™ Sensor for End-Point Detection

Model: process-sense-tfs-end-point-monitor

Type
Chamber Endpoint Sensor
Measurement Technique
Tunable Filter Spectroscopy
Measurement Range
SiF4: 1 - 200 ppm (at 760 Torr)
Detection Limit
2 ppm SiF4
Response Time
1 second report rate
Calibration Accuracy
±10%
Repeatability
<1% Full Scale, consecutive measurements
Electrical Connector
DB15
Power Requirements
120 VAC, 230 VAC, or 24 VDC (2 amp)
Dimensions
Sensor: 17.2 x 5.9 x 5.5 in. (437 x 150 x 140 mm)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm)

Weight
3.2 kg (7 lbs)
Analog Output
Analog 1 (AO1): 0 - 10 V (user configurable)
Analog 2 (AO2): 0 - 10 V (user configurable)
Digital Output
Digital 1: Fault status signal
Digital Service Port: Diagnostic codes
Sample Pressure
0.5 - 760 Torr
Sample Temperature
20 - 60°C
Fittings
NW25 (other sizes available upon request)
Compliance
CE

Type
Chamber Endpoint Sensor
Measurement Technique
Tunable Filter Spectroscopy
Measurement Range
SiF4: 1 - 200 ppm (at 760 Torr)
Detection Limit
2 ppm SiF4
Response Time
1 second report rate
Calibration Accuracy
±10%
Repeatability
<1% Full Scale, consecutive measurements
Electrical Connector
DB15
Power Requirements
120 VAC, 230 VAC, or 24 VDC (2 amp)
Dimensions
Sensor: 17.2 x 5.9 x 5.5 in. (437 x 150 x 140 mm)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm)

Weight
3.2 kg (7 lbs)
Analog Output
Analog 1 (AO1): 0 - 10 V (user configurable)
Analog 2 (AO2): 0 - 10 V (user configurable)
Digital Output
Digital 1: Fault status signal
Digital Service Port: Diagnostic codes
Sample Pressure
0.5 - 760 Torr
Sample Temperature
20 - 60°C
Fittings
NW25 (other sizes available upon request)
Compliance
CE

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