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MF1 Compact, Elastomer-sealed 10-50,000 sccm Mass Flow Controller

Model: mf1-mass-flow-controller

Full Scale Flow Range
10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure
10 bar(g)
Normal Operating Pressure Differential
10 to 5000 sccm: 0.7 to 2.7 bar (d)
10000 to 20000 sccm: 1.0 to 2.7 bar (d)
(with atmospheric pressure at the MFC outlet)
Proof Pressure
10 bar
Burst Pressure
50 bar
Control Range
2% to 100% of Full Scale
Typical Accuracy
±(0.5% of reading +0.2% of Full Scale)
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.04% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Pressure Coefficient
<0.02% of reading/psi
Typical Settling Time
<800 msec
Warm-up Time
15 minutes

Operating Temperature
0° to 40°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-9 mbar l/sec (He) (scc/sec He)
Leak Integrity Through Closed Valve
<1 x 10^-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere
Wetted Materials
Standard: 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel
Optional: NBR, FFKM (seals and valve seal)
Surface Finish
6.3µ Rz
Power Requirements
±15 VDC or +24 VDC (300mA)
Power Connector
Standard Industrial Terminal, 3.81 mm pitch
Setup Connector
USB Setup Interface micro-B
Weight
1.6 lbs (0.7 kg)
Compliance
CE

Full Scale Flow Range
10, 20, 50, 100, 200, 500, 1,000, 2,000, 5,000, 10,000, 20,000, 30,000, 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure
10 bar(g)
Normal Operating Pressure Differential
10 to 5000 sccm: 0.7 to 2.7 bar (d)
10000 to 20000 sccm: 1.0 to 2.7 bar (d)
(with atmospheric pressure at the MFC outlet)
Proof Pressure
10 bar
Burst Pressure
50 bar
Control Range
2% to 100% of Full Scale
Typical Accuracy
±(0.5% of reading +0.2% of Full Scale)
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.04% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Pressure Coefficient
<0.02% of reading/psi
Typical Settling Time
<800 msec
Warm-up Time
15 minutes

Operating Temperature
0° to 40°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-9 mbar l/sec (He) (scc/sec He)
Leak Integrity Through Closed Valve
<1 x 10^-5 mbar l/sec (He) at 1.7 bar(g) inlet to atmosphere
Wetted Materials
Standard: 1.4301 S.S. (V2A, ANSI 304), FKM, Nickel
Optional: NBR, FFKM (seals and valve seal)
Surface Finish
6.3µ Rz
Power Requirements
±15 VDC or +24 VDC (300mA)
Power Connector
Standard Industrial Terminal, 3.81 mm pitch
Setup Connector
USB Setup Interface micro-B
Weight
1.6 lbs (0.7 kg)
Compliance
CE

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