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IM50A IP66-rated Metal-sealed 5-50,000 sccm Mass Flow Controllers

Model: im50a-mass-flow-controller

Full Scale Flow Range
5-50,000 sccm (N2 equivalent)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
5-5000 sccm: 10-40 psid
10000-20000 sccm: 15-40 psid
30000-50000 sccm: 25-40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2-100% of Full Scale
Typical Accuracy
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec., typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0-95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)

Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Seal Material
Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
MFC: 10µ inch average Ra (electropolished)
Enclosure Rating
IP66
Power Requirements
+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal
0-5 VDC
Analog I/O Connector
15-pin Type "D" male, 9-pin Type "D" Male
Profibus Input Power Required
+15 to +24 VDC (<4 watts)
Profibus Connector
9 pin Type D male (power) and 9 pin Type D female (comm.)
Profibus Data Rate Switch Selection
Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size
Up to 99 nodes
Profibus MAC ID Switches Addresses
Station Addresses 0,0 to 9,9
Profibus Digital I/O Network Topology
Master/slave
Weight
3 lbs (1.4 kg)
Compliance
CE

Full Scale Flow Range
5-50,000 sccm (N2 equivalent)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
5-5000 sccm: 10-40 psid
10000-20000 sccm: 15-40 psid
30000-50000 sccm: 25-40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2-100% of Full Scale
Typical Accuracy
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec., typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0-95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)

Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Seal Material
Viton, Buna-N, Neoprene, Kalrez®, EPDM (Class VI), or Viton (Class VI)
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
MFC: 10µ inch average Ra (electropolished)
Enclosure Rating
IP66
Power Requirements
+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal
0-5 VDC
Analog I/O Connector
15-pin Type "D" male, 9-pin Type "D" Male
Profibus Input Power Required
+15 to +24 VDC (<4 watts)
Profibus Connector
9 pin Type D male (power) and 9 pin Type D female (comm.)
Profibus Data Rate Switch Selection
Set Data Rate via Profibus® - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size
Up to 99 nodes
Profibus MAC ID Switches Addresses
Station Addresses 0,0 to 9,9
Profibus Digital I/O Network Topology
Master/slave
Weight
3 lbs (1.4 kg)
Compliance
CE