Sorry, this product is no longer offered for sale. For recommended replacements see mass-flow-controllers.

IM100A IP66-rated Metal-sealed 50-100 slm Mass Flow Controllers

Model: im100a-mass-flow-controller

Full Scale Flow Range
50,000 to 100,000 sccm (N2 equivalent)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
50,000 - 100,000 sccm; 40 to 80 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2% to 100% of Full Scale
Typical Accuracy
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Rdg./°C
Inlet Pressure Coefficient
<0.02% of Rdg./psi
Typical Settling Time
<750 msec., typical above 10% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)

Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Valve Seat Material
EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
10µ inch average Ra (electropolished)
Enclosure Rating
IP66
Power Requirements
+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal
Voltage: (0 to 5 VDC) 15 pin Type "D" male
Current: (4 to 20 mA) 15 pin Type "D" male
Profibus Input Power Required
+15 to +24 VDC (<4 watts)
Profibus Connector
9 pin Type D male (power)
9 pin Type D female (comm.)
Profibus Data Rate Switch Selection
Set Data Rate via Profibus - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size
Up to 99 nodes
Profibus MAC ID Switches Addresses
2 switches, 10 positions
Profibus Digital I/O Network Topology
Master/slave
Weight
3 lbs (1.4 kg)
Compliance
CE

Full Scale Flow Range
50,000 to 100,000 sccm (N2 equivalent)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
50,000 - 100,000 sccm; 40 to 80 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2% to 100% of Full Scale
Typical Accuracy
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Rdg./°C
Inlet Pressure Coefficient
<0.02% of Rdg./psi
Typical Settling Time
<750 msec., typical above 10% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)

Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Valve Seat Material
EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
10µ inch average Ra (electropolished)
Enclosure Rating
IP66
Power Requirements
+15 to +24 VDC @ (<4 watts)
Flow Input Output Signal
Voltage: (0 to 5 VDC) 15 pin Type "D" male
Current: (4 to 20 mA) 15 pin Type "D" male
Profibus Input Power Required
+15 to +24 VDC (<4 watts)
Profibus Connector
9 pin Type D male (power)
9 pin Type D female (comm.)
Profibus Data Rate Switch Selection
Set Data Rate via Profibus - 9.6 Kbps to 12 Mbps
Profibus Digital I/O Network Size
Up to 99 nodes
Profibus MAC ID Switches Addresses
2 switches, 10 positions
Profibus Digital I/O Network Topology
Master/slave
Weight
3 lbs (1.4 kg)
Compliance
CE

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