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GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators

Model: ghw-high-reliability-rf-plasma-generators

Type
GHW Series 13.56 MHz RF Plasma Generator
Frequency
13.56MHz ±0.005%
Power Output
GHW-12: 1250 W
GHW-25: 2500 W
GHW-50: 5000 W
Load Impedance Range
Unlimited
RF Stability/Spurious Output
Unconditionally stable for any load within operational limits < -45dBc
Harmonic Output & Distortion
< -40dBc
Load Mismatch Protection
GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power.
Regulation Tolerance
GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W
Input AC Power
GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE
RF Connector
Type N

Interface
Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
Readout
Digital readout displays frequency and forward, reflected and load power.
Rack Mounting
EIA (Standard) 19-inch adapters supplied
Cooling System
GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
Dimensions
GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
(H x W x D, excluding handles & connectors)
Weight
GHW-12: 32.5 lbs. (14.8 kg)
GHW-25: 55 lbs. (24.9 kg)
GHW-50: 91 lbs. (41.3 kg)
Compliance
CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1

Type
GHW Series 13.56 MHz RF Plasma Generator
Frequency
13.56MHz ±0.005%
Power Output
GHW-12: 1250 W
GHW-25: 2500 W
GHW-50: 5000 W
Load Impedance Range
Unlimited
RF Stability/Spurious Output
Unconditionally stable for any load within operational limits < -45dBc
Harmonic Output & Distortion
< -40dBc
Load Mismatch Protection
GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power.
Regulation Tolerance
GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W
Input AC Power
GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE
RF Connector
Type N

Interface
Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
Readout
Digital readout displays frequency and forward, reflected and load power.
Rack Mounting
EIA (Standard) 19-inch adapters supplied
Cooling System
GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
Dimensions
GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
(H x W x D, excluding handles & connectors)
Weight
GHW-12: 32.5 lbs. (14.8 kg)
GHW-25: 55 lbs. (24.9 kg)
GHW-50: 91 lbs. (41.3 kg)
Compliance
CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1

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