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AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator

Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C
O2 flow rate from 5 slm to 80 slm enables process flexibility
Patented cell structure design improves gap uniformity to enable production of high concentration ozone

1 Products

AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator

1 Products

Vacuum Valve Rebuild Kits

Internal replacement parts for vacuum valves
Service or maintain a vacuum valve
Spare parts for limited downtime

6 Products

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Description	Avail.	Price
100012029 Valve Rebuild Kit, 24 VDC Solenoid, Normally Closed, Viton O-Rings, ECv Valve	4 Weeks	$513	100012029 Valve Rebuild Kit, 24 VDC Solenoid, Normally Closed, Viton O-Rings, ECv Valve 4 Weeks $513
100008311 Valve Rebuild Kit with Viton O-Rings, Toggle-actuated CV, IDA Vacuum Valves	4 Weeks	$315	100008311 Valve Rebuild Kit with Viton O-Rings, Toggle-actuated CV, IDA Vacuum Valves 4 Weeks $315
100004937 Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves	4 Weeks	$300	100004937 Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves 4 Weeks $300
100012027 Valve Rebuild Kit, 12 VDC Solenoid, Normally Closed, Viton O-Rings, ECv Valves	3 Weeks	$515	100012027 Valve Rebuild Kit, 12 VDC Solenoid, Normally Closed, Viton O-Rings, ECv Valves 3 Weeks $515
100010491 Valve Rebuild Kit, Viton O-Rings, Manual CV Valves	4 Weeks	$300	100010491 Valve Rebuild Kit, Viton O-Rings, Manual CV Valves 4 Weeks $300

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Vacuum Valve Rebuild Kits

6 Products

100316306 - Overpressure Ring, NW50 ISO-KF Flange, 80 psig, 304 Stainless Steel

Seal overpressure connections between two ISO-KF flange faces
Can be added to standard centering rings
5-100 psig operation

$14.12

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100316306-Overpressure Ring, NW50 ISO-KF Flange, 80 psig, 304 Stainless Steel

In Stock

$14.12

100762508 - Step Flange Reducer, ISO-MF Size NW 80 to NW 100, 304 Stainless Steel

Short length step profile
304 Stainless Steel construction
NW80-NW160 to NW63-NW100

$384

1 Week

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100762508-Step Flange Reducer, ISO-MF Size NW 80 to NW 100, 304 Stainless Steel

1 Week

$384

da01a baratron devicenet 0.1-1000 torr heated capacitance manometer

DA01B 0.1-1000 Torr Heated & Unheated Baratron® DeviceNet Capacitance Manometers

Unheated or controlled to 45°C, 80°C or 100°C
DeviceNet™ Communications and 0-10 VDC output proportional to pressure
Full Scale ranges of 1000 to 1 Torr (Unheated), 1000 to 0.1 Torr/mbar

1 Products

DA01B 0.1-1000 Torr Heated & Unheated Baratron® DeviceNet Capacitance Manometers

1 Products

paragon 8.0 slm nf3 flow intelligent remote plasma source

Paragon® 8.0 slm NF₃ Flow Intelligent Remote Plasma Source

Up to 8 slm NF flow, in a compact size enables faster clean times
Best in Class dissociation (>95%) for efficient uniform cleaning results
EtherCAT intelligent data reporting for faster, tighter device operation

1 Products

Paragon® 8.0 slm NF₃ Flow Intelligent Remote Plasma Source

1 Products

253B Exhaust Throttle Valves

2 Products

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	Compare	Description		Avail.	Price	Qty.
		253B-4-100-2 Exhaust Throttle Valve, 3.875 in. ID, NW100 ISO-MF		Contact Us	$3,619		253B-4-100-2 Exhaust Throttle Valve, 3.875 in. ID, NW100 ISO-MF Contact Us $3,619
		253B-3-80-2 Exhaust Throttle Valve, 3.00 in. ID, NW80 ISO-MF		Contact Us	$2,918		253B-3-80-2 Exhaust Throttle Valve, 3.00 in. ID, NW80 ISO-MF Contact Us $2,918

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253B Exhaust Throttle Valves

2 Products

CF Flange Bellows Sections

Flexible bellows design for bending and contraction
One rotatable and one non-rotatable flange
Thru hole bolt CF flanges

4 Products

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Description	Avail.	Price
100882028 Bellows Hose, 2.125 inch CF Flange, 3.2 to 3.41 in., 321 Stainless Steel	8 Weeks	$281	100882028 Bellows Hose, 2.125 inch CF Flange, 3.2 to 3.41 in., 321 Stainless Steel 8 Weeks $281
100883047 Bellows Hose, 2.75 inch CF Flange, 3.2 to 4.15 in., 321 Stainless Steel	1 Week	$302	100883047 Bellows Hose, 2.75 inch CF Flange, 3.2 to 4.15 in., 321 Stainless Steel 1 Week $302
100884025 Bellows Hose, 3.375 inch CF Flange, 3.2 to 4.29 in., 321 Stainless Steel	7 Weeks	$417	100884025 Bellows Hose, 3.375 inch CF Flange, 3.2 to 4.29 in., 321 Stainless Steel 7 Weeks $417
100881045 Bellows Hose, 1.33 inch CF Flange, 3.8 to 4.15 in., 321 Stainless Steel	6 Weeks	$347	100881045 Bellows Hose, 1.33 inch CF Flange, 3.8 to 4.15 in., 321 Stainless Steel 6 Weeks $347

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CF Flange Bellows Sections

4 Products

Vacuum Valve Seals

Vacuum valve internal seals
Service or maintain a vacuum valve
Spare parts for limited downtime

3 Products

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Description	Avail.	Price
100012281 O-Ring Seal Kit, Viton, CV, ECv Valves	4 Weeks	$23.10	100012281 O-Ring Seal Kit, Viton, CV, ECv Valves 4 Weeks $23.10
100012284 O-Ring Seal Kit, Silicone, CV, ECv Vacuum Valves	4 Weeks	$28	100012284 O-Ring Seal Kit, Silicone, CV, ECv Vacuum Valves 4 Weeks $28
100012283 O-Ring Seal Kit, Kalrez, CV, ECv Vacuum Valves	4 Weeks	$233	100012283 O-Ring Seal Kit, Kalrez, CV, ECv Vacuum Valves 4 Weeks $233

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Vacuum Valve Seals

3 Products

AA02A Baratron® 0.1-1000 Torr Heated Absolute Capacitance Manometers

Full scale pressure measurement from 0.1 to 1000 Torr
Sensor heated to 45°, 80°, or 100°C for up to 0.10% of reading accuracy
Fully welded sensor built entirely from Inconel® and Incoloy® nickel alloys

2 Products

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	Compare	Description		Avail.	Price	Qty.
		AA02A.1TGAS48B000H00 Absolute Pressure Transducer, 0.1 Torr, 80°C, NW16 ISO-KF, 0-10 VDC, DB15		Contact Us	$2,432		AA02A.1TGAS48B000H00 Absolute Pressure Transducer, 0.1 Torr, 80°C, NW16 ISO-KF, 0-10 VDC, DB15 Contact Us $2,432
		AA02A Absolute Capacitance Manometer, 0.1-1000 Torr, 13.3 Pa-133.3 kPa		Contact Us			AA02A Absolute Capacitance Manometer, 0.1-1000 Torr, 13.3 Pa-133.3 kPa Contact Us

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AA02A Baratron® 0.1-1000 Torr Heated Absolute Capacitance Manometers

2 Products

ISO-KF Centering Ring Replacement O-Rings

Replacement O-rings for centering rings
Viton®, Buna-N, or Silicon materials
Keep as spares for increased up-time

5 Products

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Description	Avail.	Price
100313900 Buna-N O-Ring, NW10 Size ISO-KF Vacuum Flange, 2-312 O-Ring Size	Contact Us	$1.05	100313900 Buna-N O-Ring, NW10 Size ISO-KF Vacuum Flange, 2-312 O-Ring Size Contact Us $1.05
100313901 Buna-N O-Ring, NW16 Size ISO-KF Vacuum Flange, 2-314 O-Ring Size	7 Weeks	$0.92	100313901 Buna-N O-Ring, NW16 Size ISO-KF Vacuum Flange, 2-314 O-Ring Size 7 Weeks $0.92
100313903 Buna-N O-Ring, NW25 Size ISO-KF Vacuum Flange, 2-320 O-Ring Size	7 Weeks	$1.05	100313903 Buna-N O-Ring, NW25 Size ISO-KF Vacuum Flange, 2-320 O-Ring Size 7 Weeks $1.05
100313905 Buna-N O-Ring, NW40 Size ISO-KF Vacuum Flange, 2-326 O-Ring Size	In Stock	$1.28	100313905 Buna-N O-Ring, NW40 Size ISO-KF Vacuum Flange, 2-326 O-Ring Size In Stock $1.28
100313906 Buna-N O-Ring, NW50 Size ISO-KF Vacuum Flange, 2-330 O-Ring Size	6 Weeks	$1.39	100313906 Buna-N O-Ring, NW50 Size ISO-KF Vacuum Flange, 2-330 O-Ring Size 6 Weeks $1.39

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ISO-KF Centering Ring Replacement O-Rings

5 Products

ISO Centering Ring Buna-N O-Rings

Replacement Buna-N O-rings for ISO centering rings
80 °C maximum temperature
Keep as spares for increased up-time

10 Products

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Description	Avail.	Price
100761906 Buna-N O-Ring, NW63 Size ISO-MF Vacuum Flange, 2-336 O-Ring Size	7 Weeks	$1.97	100761906 Buna-N O-Ring, NW63 Size ISO-MF Vacuum Flange, 2-336 O-Ring Size 7 Weeks $1.97
100761916 Buna-N O-Ring, NW160 Size ISO-MF Vacuum Flange, 2-361 O-Ring Size	7 Weeks	$3.94	100761916 Buna-N O-Ring, NW160 Size ISO-MF Vacuum Flange, 2-361 O-Ring Size 7 Weeks $3.94
100761920 Buna-N O-Ring, NW200 Size ISO-MF Vacuum Flange, 2-371 O-Ring Size	Contact Us	$7.18	100761920 Buna-N O-Ring, NW200 Size ISO-MF Vacuum Flange, 2-371 O-Ring Size Contact Us $7.18
100761925 Buna-N O-Ring, NW250 Size ISO-MF Vacuum Flange, 2-378 O-Ring Size	7 Weeks	$8.80	100761925 Buna-N O-Ring, NW250 Size ISO-MF Vacuum Flange, 2-378 O-Ring Size 7 Weeks $8.80
100761932 Buna-N O-Ring, NW320 Size ISO-MF Vacuum Flange, 2-454 O-Ring Size	Contact Us	$30	100761932 Buna-N O-Ring, NW320 Size ISO-MF Vacuum Flange, 2-454 O-Ring Size Contact Us $30