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R*evolution® III 6 slm Remote Plasma Source

Model: r-evolution-3-remote-rf-plasma-source

Type
AX7695 Integrated Remote Plasma Source
Ignition Gas Supply
100% O2 or Ar, or 90% O2/10% N2 (contact MKS for ignition with other gases)
Process Gas Supply
Up to 6.0 slm of 100% O2, or 90% O2/10% N2 (contact MKS for ignition with other gases)
Operating Pressure
Ignition: 0.5 to 2.0 Torr @ 1.0 to 6.0 slm (pressure measured at R*evolution III outlet)
Process: 0.5 to 2.0 Torr @ 1.0 to 6.0 slm
Output
Ready, AC line, Plasma On, Power Monitor
Inputs
Plasma On/Off, Power Set
Duty Cycle
100%
Interlocks
Internal thermal switch and internal water flow switch to protect against insufficient cooling
Wetted Materials
6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone

Control Interface
Discrete I/O, 9 and 25 pin D connectors, RS-232, DeviceNet™ and Ethernet (MKS TOOLweb®-enabled)
Power Requirements
180 to 228 VAC, 50/60 Hz, 30A, 3 phase
Cooling Water
1.75 gpm, < 30°C
Operating Temperature
Ambient 40°C max.
Dimensions
15.7 inches long, 13.7 inches wide, 12.14 inches high (399 mm x 348 mm x 308 mm nominal)
Weight
85 lb. (38.6 Kg)
Compliance
CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

Type
AX7695 Integrated Remote Plasma Source
Ignition Gas Supply
100% O2 or Ar, or 90% O2/10% N2 (contact MKS for ignition with other gases)
Process Gas Supply
Up to 6.0 slm of 100% O2, or 90% O2/10% N2 (contact MKS for ignition with other gases)
Operating Pressure
Ignition: 0.5 to 2.0 Torr @ 1.0 to 6.0 slm (pressure measured at R*evolution III outlet)
Process: 0.5 to 2.0 Torr @ 1.0 to 6.0 slm
Output
Ready, AC line, Plasma On, Power Monitor
Inputs
Plasma On/Off, Power Set
Duty Cycle
100%
Interlocks
Internal thermal switch and internal water flow switch to protect against insufficient cooling
Wetted Materials
6061-T6 Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone

Control Interface
Discrete I/O, 9 and 25 pin D connectors, RS-232, DeviceNet™ and Ethernet (MKS TOOLweb®-enabled)
Power Requirements
180 to 228 VAC, 50/60 Hz, 30A, 3 phase
Cooling Water
1.75 gpm, < 30°C
Operating Temperature
Ambient 40°C max.
Dimensions
15.7 inches long, 13.7 inches wide, 12.14 inches high (399 mm x 348 mm x 308 mm nominal)
Weight
85 lb. (38.6 Kg)
Compliance
CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1

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