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Specifications

  • Full Scale Flow Range
    2 - 20 sccm (N2 equivalent)
  • Inlet Pressure Range
    4 - 1200 Torr (with vacuum at the outlet)
  • Normal Operating Pressure Differential
    <10 Torr at Full Scale flow (with vacuum at the outlet)
  • Burst Pressure
    1500 psig
  • Control Range
    2 to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for >10 to 100% Full Scale
    ±0.2% of Full Scale for 2 to 10% of Full Scale
  • Repeatability
    0.2% of Full Scale
  • Resolution
    0.1% of Reading
  • Zero Temperature Coefficient
    ±0.08% of Full Scale /°C
  • Span Temperature Coefficient
    ±0.08% of Reading/°C
  • Typical Settling Time
    <2 sec. typical above 10% of Full Scale at inlet pressures >10 Torr
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10 to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non condensing
  • Storage Temperature
    -20 to 65°C
  • Temperature Display
    0 to 100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Fitting Type
    Swagelok® 4 VCR®
  • External Leak Integrity
    <1x10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of FS at 25 psig to atmosphere
  • Wetted Materials
    316 S.S. VAR, 316 S.S., Elgiloy, KM-45, NiTi (Standard)
  • Surface Finish
    5 microinch average Ra
  • Weight
    2 lbs. (0.9 kg)
  • Power Requirements
    15-24 VDC ±5%VDC @ 350mA peak, 250 mA steady state
  • Analog I/O Connector
    9 pin "D" male or 15 pin "D" male
  • Set Point Command Signal
    0 to 5 VDC
  • Flow Input Output Signal
    0 to 5 VDC

Resources

Literature

Application Notes

Manuals

Device Description Files

Drawings & CADs